Semiconductor device having low dielectric insulating film and manufacturing method of the same
AssigneeTera Probe, Inc.
InventorsAiko Mizusawa, Osamu Okada, Takeshi Wakabayashi, Ichiro Mihara
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AssigneeTera Probe, Inc.
InventorsAiko Mizusawa, Osamu Okada, Takeshi Wakabayashi, Ichiro Mihara
Estimating the term…
A semiconductor device includes a semiconductor substrate on which a structure portion is provided except a peripheral portion thereof, and has a laminated structure including low dielectric films and wiring lines, the low dielectric films having a relative dielectric constant of 3.0 or lower and a glass transition temperature of 400° C. or higher. An insulating film is formed on the structure portion. A connection pad portion is arranged on the insulating film and connected to an uppermost wiring line of the laminated structure portion. A bump electrode is provided on the connection pad portion. A sealing film made of an organic resin is provided on a part of the insulating film which surrounds the bump electrode. Side surfaces of the laminated structure portion are covered with the insulating film and/or the sealing film.
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.