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US 9,070,611 B2Granted
Image sensor with controllable vertically integrated photodetectors
AssigneeSemiconductor Components Industries, LLC
InventorsJohn P. McCarten, Robert Michael Guidash
Life of this patent
Estimating the term…
Abstract
An image sensor includes front-side and backside photodetectors of a first conductivity type disposed in a substrate layer of the first conductivity type. A front-side pinning layer of a second conductivity type is connected to a first contact. The first contact receives a predetermined potential. A backside pinning layer of the second conductivity type is connected to a second contact. The second contact receives an adjustable and programmable potential.
Claims13
An image sensor comprising:
- a substrate layer of a first conductivity type;
- a first contact for receiving a predetermined constant potential;
- a second contact for receiving a time variant potential;
- and
- a plurality of pixels with at least one pixel comprising:
- a front-side photodetector of the first conductivity type disposed in the substrate layer adjacent to a front-side of the substrate layer;
- a front-side pinning layer of a second conductivity type disposed in the front-side photodetector spanning the front-side photodetector, wherein the first contact is electrically connected to the front-side pinning layer;
- a backside photodetector of the first conductivity type disposed in the substrate layer adjacent to a backside of the substrate layer;
- a backside pinning layer of the second conductivity type spanning the backside photodetector, wherein the second contact is electrically connected to the backside pinning layer and the backside pinning layer being completely separated from the front-side pinning layer by a material of the first conductivity type such that the front-side pinning layer and the backside pinning layer are not in contact;
- and
- an electrostatic barrier disposed in the substrate layer between the front-side photodetector and the backside photodetector, the time-variant potential configures the electrostatic barrier to one of:
- (i) electrically isolate the front-side photodetector and the backside photodetector and (ii) electrically couple the front-side photodetector and the backside photodetector as a function of the time-variant potential.
9 more elements
An image sensor comprising:
- a substrate layer of a first conductivity type;
- a first contact for receiving a predetermined constant potential;
- a second contact for receiving a time-variant potential;
- and
- a plurality of pixels with at least one pixel comprising:
- a front-side photodetector of the first conductivity type disposed in the substrate layer adjacent to a front-side of the substrate layer;
- a front-side pinning layer of a second conductivity type disposed in the front-side photodetector spanning the front-side photodetector, wherein the first contact is electrically connected to the front-side pinning layer;
- a backside photodetector of the first conductivity type disposed in the substrate layer adjacent to a backside of the substrate layer;
- a backside pinning layer of the second conductivity type spanning the backside photodetector, wherein the second contact is electrically connected to the backside pinning layer and the backside pinning layer being completely separated from the front-side pinning layer by a material of the first conductivity type such that the front-side pinning layer and the backside pinning layer are not in contact;
- and
- fully depleted photodetector regions at the front-side photodetector and at the backside photodetector and a middle barrier region separating the fully depleted photodetector regions in response to the time-variant potential, the time-variant potential configures the middle barrier region to electrically isolate the front-side fully depleted photodetector region and the backside fully depleted photodetector region and to electrically couple the front-side fully depleted photodetector region and the backside fully depleted photodetector region as a function of the time-variant potential.
8 more elements
Dependencies are inferred from the claim text.