Non-volatile memory structure
AssigneeMacronix International Co., Ltd.
InventorsChih-Chieh Cheng, Shih-Guei Yan, Wen-Jer Tsai
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AssigneeMacronix International Co., Ltd.
InventorsChih-Chieh Cheng, Shih-Guei Yan, Wen-Jer Tsai
Estimating the term…
A non-volatile memory structure, including a substrate, a plurality of stacked structures, a plurality of first conductive type doped regions, at least one second conductive type doped region, a conductive layer, and a first dielectric layer, is provided. The stacked structures are disposed on the substrate, and each of the stacked structures includes a charge storage structure. The first conductive type doped regions are disposed in the substrate under the corresponding charge storage structures respectively. The second conductive type doped region is disposed in the substrate between the adjacent charge storage structures and has an overlap region with each of the charge storage structures. The conductive layer covers the second conductive type doped region. The first dielectric layer is disposed between the conductive layer and the second conductive type doped region.
A non-volatile memory structure, comprising:
Dependencies are inferred from the claim text.