Metal hardmask compositions
AssigneeRohm and Haas Electronic Materials LLC
InventorsDeyan Wang, Jibin Sun, Peter Trefonas, Kathleen M. O'connell
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Abstract
The invention provides a composition comprising at least the following A and B: A) a polymer comprising, in polymerized from, at least one “monomer that comprises at least one hydroxyl group;” and B) an organometal compound comprising at least one metal selected from Ti, Zr, Hf, Co, Mn, Zn, or combinations thereof, and wherein the organometal compound is present in an amount greater than 5 weight percent, based on the sum weight of A and B.
Claims20
A composition comprising at least the following A and B:
- A) a polymer comprising, in polymerized form, at least one monomer that comprises at least one hydroxyl group;
- and
- B) an organometal compound comprising at least one metal selected from Ti, Zr, Hf, Co, Mn, Zn, or combinations thereof, and
- wherein the organometal compound is present in an amount greater than 50 weight percent, based on the sum weight of A and B;
- and
- wherein the monomer that comprises at least one hydroxyl group is selected from HEMA, OH-styrene, or combinations thereof.
A composition comprising at least the following A and B:
- A) a polymer comprising, in polymerized form, at least one monomer that comprises at least one hydroxyl group;
- and
- B) an organometal compound comprising at least one metal selected from Ti, Zr, Hf, Co, Mn, Zn, or combinations thereof, and
- wherein the organometal compound is present in an amount greater than 50 weight percent, based on the sum weight of A and B;
- and
- wherein the monomer that comprises at least one hydroxyl group is selected from OH-acrylate, OH-methacrylate or OH-ethacrylate.
A composition comprising at least the following A and B:
- A) a polymer comprising, in polymerized form, at least one monomer that comprises at least one hydroxyl group;
- and
- B) an organometal compound comprising at least one metal selected from Ti, Zr, Hf, Co, Mn, Zn, or combinations thereof, and
- wherein the organometal compound is present in an amount greater than 50 weight percent, based on the sum weight of A and B;
- and
- wherein the polymer further comprises an acrylate, a methacrylate, or an ethacrylate.
Dependencies are inferred from the claim text.