Pinched plasma bridge flood gun for substrate charge neutralization

A plasma loop assembly for a plasma flood gun in ion implantation system, the plasma loop assembly comprising:

• an insulating block portion, and first and second conductive block portions disposed on opposite sides of the insulating block portion, the first and second conductive block portions and the insulating block portion having respective recesses forming a closed loop plasma chamber;
• and
• a conductive strap coupled between the first and second conductive block portions;
• wherein the first and second conductive block portions receive radio frequency (RF) electrical power to generate a plasma within the closed loop plasma chamber by exciting a gaseous substance;
• wherein the respective recess in the second conductive block portion includes a pinch region positioned immediately adjacent an outlet aperture, the pinch region configured to allow easy transport of the plasma through the outlet aperture, which is sized to allow charged particles of the plasma to flow therethrough.

A plasma loop assembly for materials processing applications, the plasma loop assembly comprising:

• an insulating block portion, and first and second conductive block portions disposed on opposite sides of the insulating block portion, the first and second conductive block portions and the insulating block portion having respective recesses forming a closed loop plasma chamber, the respective recess in the second conductive block portion including an outlet aperture sized to allow charged particles of the plasma to flow therethrough;
• and
• a conductive strap coupling the first conductive block portion to the second conductive block portions;
• wherein the first and second conductive block portions receive radio frequency (RF) electrical power to generate a plasma within the closed loop plasma chamber by exciting a gaseous substance;
• and
• wherein the respective recess in at least one of the first conductive block portion, the second conductive block portion or the insulating block portion is coupled to an outlet aperture.