US 9,070,180 B2 · Method, system, and computer program product for detection of defects based on multiple references

Abstract

A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the system including: an interface for obtaining an inspected noise-indicative value and multiple reference noise-indicative values, the inspected noise-indicative value representative of an analyzed pixel and each of the reference noise-indicative values representative of a reference pixel among a plurality of reference pixels; and a processor, including: a noise analysis module, configured to compute a representative noise-indicative value based on a plurality of noise-indicative values which includes the inspected noise-indicative value and the multiple reference noise-indicative values; and a defect analysis module, configured to calculate a defect-indicative value based on an inspected value representative of the analyzed pixel, and to determine a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

Claims20

Dependent claims

A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image of the inspected object, the system comprising:

a memory;
and
a processor operatively coupled to the memory to:
identify an analyzed pixel from a first cell of the inspection image of the inspected object;
identify a plurality of reference pixels from a plurality of cells of the inspection image of the inspected object, the plurality of cells being other cells in the inspection image than the first cell of the inspection image;
obtain an inspected noise-indicative value representative of the analyzed pixel of the first cell of the inspected image, and a plurality of reference noise-indicative values representative of the plurality of reference pixels from the plurality of cells other than the first cell of the inspection image;
compute a representative noise-indicative value based on a plurality of noise-indicative values which comprises the inspected noise-indicative value and the plurality of reference noise-indicative values;
calculate a defect-indicative value based on an inspected value representative of the analyzed pixel;
and
determine a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

7 more elements

A method for computerized detection of defects in an inspected object based on processing of an inspection image of the inspected object, the method comprising:

identifying an analyzed pixel from a first cell of the inspection image of the inspected object;
identifying, by a processor, a plurality of reference pixels from a plurality of cells of the inspection image of the inspected object, the plurality of cells being other cells in the inspection image than the first cell of the inspection image;
obtaining an inspected noise-indicative value representative of the analyzed pixel of the first cell of the inspected image, and a plurality of reference noise-indicative values representative of the plurality of reference pixels from the plurality of cells other than the first cell of the inspection image;
computing a representative noise-indicative value based on a plurality of noise-indicative values which comprises the noise-indicative value and the plurality of reference noise-indicative values;
calculating a defect-indicative value based on an inspected value representative of the analyzed pixel;
and
determining a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

4 more elements

A program storage device readable by machine, tangibly embodying a program of instructions executable by the machine to perform operations for computerized detection of defects in an inspected object based on processing of an inspection image of the inspected object, comprising:

identifying an analyzed pixel from a first cell of the inspection image of the inspected object;
identifying, by the machine, a plurality of reference pixels from a plurality of cells of the inspection image of the inspected object, the plurality of cells being other cells in the inspection image than the first cell of the inspection image;
obtaining an inspected noise-indicative value representative of the analyzed pixel of the first cell of the inspected image, and a plurality of reference noise-indicative values representative of the plurality of reference pixels from the plurality of cells other than the first cell of the inspection image;
computing a representative noise-indicative value based on a plurality of noise-indicative values which comprises the noise-indicative value and the plurality of reference noise-indicative values;
calculating a defect-indicative value based on an inspected value representative of the analyzed pixel;
and
determining a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

4 more elements

Dependencies are inferred from the claim text.

Method, system, and computer program product for detection of defects based on multiple references

Life of this patent

Method, system, and computer program product for detection of defects based on multiple references

Life of this patent

Abstract

Claims20