US 9,069,336 B2Granted

Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof

AssigneeSamsung Electronics Co., Ltd.

InventorsJa Yul Kim, Sang Don Jang, Tae Kyu Son

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Abstract

A method of determining and controlling position and attitude information associated with a 6-degree-of-freedom stage includes: receiving, from a plurality of sensors associated with the 6-degree-of-freedom stage, displacement information associated with the 6-degree-of-freedom stage. A plurality of equations associated with the plurality of sensors are determined by a control unit based on the displacement information to represent an amount of change in position and attitude associated with each measurement axis of each of the plurality of sensors. The control unit determines position information and attitude information associated with the 6-degree-of-freedom stage using the equations. Movement of the 6-degree-of-freedom stage is caused, at least in part, to be controlled based on the position information, the attitude information, or both the position information and the attitude information. Three coordinate values associated with each valid measurement point of each of the plurality of sensors are associated with at least one degree of freedom.

Claims11

Dependent claims

A method, comprising:

receiving, from at least six sensors associated with a 6-degree-of-freedom stage, displacement information associated with movement of the 6-degree-of-freedom stage;
determining, by a control unit and based on the displacement information, a plurality of equations associated with the at least six sensors to represent an amount of change in position and attitude associated with each measurement axis of each of the at least six sensors;
determining, by the control unit, position information (X, Y, Z) and attitude information (Tx, Ty, Tz) associated with the 6-degree-of-freedom stage using the equations;
and
causing, at least in part, the movement of the 6-degree-of-freedom stage to be controlled based on the position information (X, Y, Z), the attitude information (Tx, Ty, Tz), or both the position information (X, Y, Z) and the attitude information (Tx, Ty, Tz),
wherein three coordinate values associated with each valid measurement point of each of the at least six sensors are associated with at least one degree of freedom,
wherein the plurality of equations respectively corresponding to the at least six sensors are determined using the following six expressions:
Measurement Information of First Sensor=−X1a+t(1,1)/pqrs(1,1) First Expression
Measurement Information of Second Sensor=−X2a+t(2,2)/pqrs(2,1) Second Expression
Measurement Information of Third Sensor=−Yb+t(3,3)/pqrs(3,2) Third Expression
Measurement Information of Fourth Sensor=−Z4c+t(4,4)/pqrs(4,3) Fourth Expression
Measurement Information of Fifth Sensor=−Z5c+t(5,5)/pqrs(5,3) Fifth Expression
Measurement Information of Sixth Sensor=−Z6c+t(6,6)/pqrs(6,3), Sixth Expression
wherein:
pqrs
=
[
1
0
0
-
X
⁢
⁢
1
⁢
a
1
0
0
-
X
⁢
⁢
2
⁢
a
0
1
0
-
Yb
0
0
1
-
Z
⁢
⁢
4
⁢
c
0
0
1
-
Z
⁢
⁢
5
⁢
c
0
0
1
-
Z
⁢
⁢
6
⁢
c
]
,
⁢
SC
=
[
0
0
Ya
Z
⁢
⁢
4
⁢
a
Z
⁢
⁢
5
⁢
a
Z
⁢
⁢
6
⁢
a
X
⁢
⁢
1
⁢
b
X
⁢
⁢
2
⁢
b
0
Z
⁢
⁢
4
⁢
b
Z
⁢
⁢
5
⁢
b
Z
⁢
⁢
6
⁢
b
X
⁢
⁢
1
⁢
c
X
⁢
⁢
2
⁢
c
Yc
0
0
0
1
1
1
1
1
1
]
,
⁢
R
x
=
[
1
0
0
0
0
cos
⁢
⁢
(
T
x
)
-
sin
⁡
(
T
x
)
0
0
sin
⁡
(
T
x
)
cos
⁢
⁢
(
T
x
)
0
0
0
0
1
]
R
y
=
[
cos
⁡
(
T
y
)
0
sin
⁡
(
T
y
)
0
0
1
0
0
-
sin
⁡
(
T
y
)
0
cos
⁢
⁢
(
T
y
)
0
0
0
0
1
]
R
z
=
[
cos
⁡
(
T
z
)
-
sin
⁡
(
T
z
)
0
0
sin
⁡
(
T
z
)
cos
⁢
⁢
(
T
z
)
0
0
0
0
1
0
0
0
0
1
]
,
⁢
t
=
-
1
⁢
pqrs
×
Rz
-
1
×
Ry
-
1
×
Rx
-
1
×
SC
,
and
wherein valid measurement points associated with the at least six sensors are P1(X1a, X1 b, X1 c) for a first sensor of the at least six sensors, P2(X2a, X2b, X2c) for a second sensor of the at least six sensors, P3(Ya, Yb, Yc) for a third sensor of the at least six sensors, P4(Z4a, Z4b, Z4c) for a fourth sensor of the at least six sensors, P5(Z5a, Z5b, Z5c) for a fifth sensor of the at least six sensors, and P6(Z6a, Z6b, Z6c) for a sixth sensor of the at least six sensors.

307 more elements

An ultra-precision position control device, comprising:

a 6-degree-of-freedom stage;
at least six sensors configured to measure displacement information associated with movement of the 6-degree-of-freedom stage;
a controller configured to:
receive displacement information associated with the 6-degree-of-freedom stage from the at least six sensors,
determine, based on the displacement information, a plurality of equations associated with the at least six sensors to represent an amount of change in position and attitude associated with each measurement axis of each of the at least six sensors,
determine position information (X, Y, Z) and attitude information (Tx, Ty, Tz) associated with the 6-degree-of-freedom stage using the equations, and
generate at least one drive command signal using the position information (X, Y, Z) and the attitude information (Tx, Ty, Tz) associated with the 6-degree-of-freedom stage;
and
a drive unit configured to receive the at least one drive command signal and to drive the 6-degree-of-freedom stage in one or more translational or rotational motions based on the at least one drive command signal,
wherein three coordinate values associated with each valid measurement point of each of the at least six sensors are associated with at least one degree of freedom,
wherein the plurality of equations respectively corresponding to the at least six sensors are determined using the following six expressions:
Measurement Information of First Sensor=−X1a+t(1,1)/pqrs(1,1) First Expression
Measurement Information of Second Sensor=−X2a+t(2,2)/pqrs(2,1) Second Expression
Measurement Information of Third Sensor=−Yb+t(3,3)/pqrs(3,2) Third Expression
Measurement Information of Fourth Sensor=−Z4c+t(4,4)/pqrs(4,3) Fourth Expression
Measurement Information of Fifth Sensor=−Z5c+t(5,5)/pqrs(5,3) Fifth Expression
Measurement Information of Sixth Sensor=−Z6c+t(6,6)/pqrs(6,3), Sixth Expression
wherein:
pqrs
=
[
1
0
0
-
X
⁢
⁢
1
⁢
a
1
0
0
-
X
⁢
⁢
2
⁢
a
0
1
1
-
Yb
0
0
1
-
Z
⁢
⁢
4
⁢
c
0
0
1
-
Z
⁢
⁢
5
⁢
c
0
0
1
-
Z
⁢
⁢
6
⁢
c
]
,
⁢
SC
=
[
0
0
Ya
Z
⁢
⁢
4
⁢
a
Z
⁢
⁢
5
⁢
a
Z
⁢
⁢
6
⁢
a
X
⁢
⁢
1
⁢
b
X
⁢
⁢
2
⁢
b
0
Z
⁢
⁢
4
⁢
b
Z
⁢
⁢
5
⁢
b
Z
⁢
⁢
6
⁢
a
X
⁢
⁢
1
⁢
c
X
⁢
⁢
2
⁢
c
Yc
0
0
0
1
1
1
1
1
1
]
,
⁢
R
x
=
[
1
0
0
0
0
cos
⁢
⁢
(
T
x
)
-
sin
⁡
(
T
x
)
0
0
sin
⁡
(
T
x
)
cos
⁢
⁢
(
T
x
)
0
0
0
0
1
]
R
y
=
[
cos
⁡
(
T
y
)
0
sin
⁡
(
T
y
)
0
0
1
0
0
-
sin
⁡
(
T
y
)
0
cos
⁢
⁢
(
T
y
)
0
0
0
0
1
]
R
z
=
[
cos
⁡
(
T
z
)
-
sin
⁡
(
T
z
)
0
0
sin
⁡
(
T
z
)
cos
⁢
⁢
(
T
z
)
0
0
0
0
1
0
0
0
0
1
]
,
⁢
t
=
-
1
⁢
pqrs
×
Rz
-
1
×
Ry
-
1
×
Rx
-
1
×
SC
,
and
wherein valid measurement points associated with the at least six sensors are P1(X1a, X1 b, X1 c) for a first sensor of the at least six sensors, P2(X2a, X2b, X2c) for a second sensor of the at least six sensors, P3(Ya, Yb, Yc) for a third sensor of the at least six sensors, P4(Z4a, Z4b, Z4c) for a fourth sensor of the at least six sensors, P5(Z5a, Z5b, Z5c) for a fifth sensor of the at least six sensors, and P6(Z6a, Z6b, Z6c) for a sixth sensor of the at least six sensors.

311 more elements

Dependencies are inferred from the claim text.