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US 9,069,261 B2Granted
Surface position detection apparatus, exposure apparatus, and exposure method
AssigneeNikon Corporation
InventorsYasuhiro Hidaka, Tadashi Nagayama
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AssigneeNikon Corporation
InventorsYasuhiro Hidaka, Tadashi Nagayama
Estimating the term…
A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.
A surface position detection apparatus which detects a position of a surface of a substrate placed on a stage, with respect to a direction intersecting the surface, on a basis of a receiving result of a light beam which is guided to the surface in a diagonal direction with respect to the surface and is reflected from the surface, the apparatus comprising:
A surface position detection method of detecting a position of a surface of a substrate placed on a stage, with respect to a direction intersecting the surface, on a basis of a receiving result of a light beam which is guided to the surface in a diagonal direction with respect to the surface and is reflected from the surface, the method comprising:
Dependencies are inferred from the claim text.