Back to results
US 9,069,256 B2Granted
Method of optical fabrication of three-dimensional polymeric structures with out of plane profile control
AssigneeCarnegie Mellon University
InventorsChao-Min Cheng, Bin Li, Philip Ray LeDuc
Life of this patent
Estimating the term…
Abstract
A method of optical fabrication comprises coating a substrate with a photocuring material, controlling the application of light to the photocuring material so as to control the intensity and pattern of the light both in-plane and out of plane, and developing the photocuring material.
Claims21
A method of optical fabrication, comprising:
- coating a substrate with a photocuring material;
- controlling the application of light to the photocuring material so as to simultaneously control the intensity and pattern of the light both in-plane and out of plane by moving a stage or a lens in an X direction, a Y direction, and a Z direction, wherein the intensity and pattern of the light are applied using a first light beam and a second light beam, wherein the first light beam and the second light beam are applied at a point to positively or negatively interfere to apply the intensity and pattern of the light;
- heating certain structures to cause thermal reflow;
- and
- developing the photocuring material.
2 more elements
A method of optical fabrication, comprising:
- coating a substrate with a photocuring material;
- heating the photocuring material;
- controlling the application of light to the photocuring material so as to simultaneously control the intensity and pattern of the light in each of an X, a Y, and a Z direction to form structures by moving a stage or a lens in an X direction, a Y direction, and a Z direction, wherein the intensity and pattern of the light are applied using a first light beam and a second light beam, wherein the first light beam and the second light beam are applied at a point to positively or negatively interfere to apply the intensity and pattern of the light;
- heating certain structures to cause thermal reflow;
- and
- developing the photocuring material.
3 more elements
A method of optical fabrication, comprising:
- coating a substrate with a photocuring material;
- reducing the viscosity of the photocuring material;
- activating a desired pattern within said photocuring material by simultaneously controlling the application of light in each of an X, a Y, and a Z direction by moving a stage or a lens in an X direction, a Y direction, and a Z direction, wherein the intensity and pattern of the light are applied using a first light beam and a second light beam, wherein the first light beam and the second light beam are applied at a point to positively or negatively interfere to apply the intensity and pattern of the light;
- heating a portion of said desired pattern to cause thermal reflow of said photocuring material;
- and
- developing the photocuring material.
3 more elements
Dependencies are inferred from the claim text.