Exposure apparatus, liquid crystal display device, and method for manufacturing liquid crystal display device
AssigneeSharp Kabushiki Kaisha
InventorsIichiro Inoue, Koichi Miyachi
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AssigneeSharp Kabushiki Kaisha
InventorsIichiro Inoue, Koichi Miyachi
Estimating the term…
This invention is an exposure apparatus for exposing a photoalignment film provided on a substrate. The exposure apparatus includes a light source and a photomask, and exposes the photoalignment film through the photomask while scanning the light source or the substrate. When a direction in which the light source or the substrate is scanned is taken as a scanning direction, and a direction that is orthogonal to the scanning direction is taken as a vertical direction, the photomask includes a first region and a second region that is adjacent to the first region in the vertical direction. The first region includes a plurality of first transparent portions inside a first light-shielding portion. The plurality of first transparent portions are arranged in the vertical direction. The second region includes a plurality of second transparent portions inside a second light-shielding portion.
An exposure apparatus for exposing a photoalignment film that is provided on a substrate, the exposure apparatus comprising:
A method for manufacturing a liquid crystal display device comprising a photoalignment film that is provided on a substrate, the method for manufacturing including:
Dependencies are inferred from the claim text.