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US 9,069,160 B2Granted
Optical filter, optical filter device, analyzer, and method for manufacturing optical filter
AssigneeSeiko Epson Corporation
InventorsNozomu Hirokubo, Tsukasa Funasaka
Life of this patent
Estimating the term…
Abstract
An optical filter includes: a first substrate and a second substrate that are disposed to face each other; a first mirror and a first electrode that are disposed on the second substrate side of the first substrate; and a second mirror and a second electrode that are disposed on the first substrate side of the second substrate, wherein the first mirror and the second mirror are connected via a wire.
Claims13
An optical filter comprising:
- a first substrate and a second substrate that are disposed to face each other;
- a first mirror and a first electrode that are disposed on a second substrate side of the first substrate;
- and
- a second mirror and a second electrode that are disposed on a first substrate side of the second substrate,
- wherein the first mirror and the second mirror are electrically connected via a wire to have a same electric potential;
- the wire includes a first wire that is extended from the first mirror to a bonding region of the first substrate, and a second wire that is extended from the second mirror to a bonding region of the second substrate, wherein the first wire and the second wire are connected to each other in the bonding regions;
- and
- the first mirror and the second mirror are separated by an air gap.
5 more elements
An optical filter comprising:
- a first substrate and a second substrate that are disposed to face each other;
- a first mirror and a first electrode that are disposed on a second substrate side of the first substrate;
- and
- a second mirror and a second electrode that are disposed on a first substrate side of the second substrate,
- wherein the first mirror and the second mirror are directly electrically connected via a wire to have a same electric potential,
- the wire including a first wire that is extended from the first mirror to a bonding region of the first substrate, and a second wire that is extended from the second mirror to a bonding region of the second substrate, wherein the first wire and the second wire are connected to each other in the bonding regions.
3 more elements
An optical filter comprising:
- a first substrate and a second substrate that are disposed to face each other;
- a first mirror and a first electrode that are each directly disposed on a surface of the first substrate that faces the second substrate;
- and
- a second mirror and a second electrode that are each directly disposed on a surface of the second substrate that faces the first substrate,
- wherein the first mirror and the second mirror are electrically connected via a wire to have a same electric potential, the wire including a first wire that is extended from the first mirror to a bonding region of the first substrate, and a second wire that is extended from the second mirror to a bonding region of the second substrate, wherein the first wire and the second wire are connected to each other in the bonding regions.
2 more elements
Dependencies are inferred from the claim text.