Planar 3-DOF stage
AssigneeAjou University Industry-Academic Cooperation Foundation
InventorsDong Hyun Hwang, Moon Gu Lee, Yong Hwan Yoo, Jae Hwa Jeong
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Abstract
The present invention relates to a planar 3-DOF (degree of freedom) stage, which includes: a transitional manipulator section having parallel 2-DOF; a rotation manipulator section having rotation 1-DOF so as to carry out motion independently from the transitional manipulator section; and a stage base mounted with the transitional manipulator section and the rotation manipulator section and having a fixing section inside and a driving section outside. According to the planar 3-DOF stage, transitional motion and rotational motion are independently carried out so that it is possible to reduce motion errors and simplify control and design.
Claims9
A planar 3-DOF stage comprising:
- a translational mechanism carrying out translational motion of 2 degrees of freedom;
- a rotational mechanism carrying out rotational motion of 1 degree of freedom independent of the translational mechanism;
- and
- a stage base equipped with the translational mechanism and the rotational mechanism, and having a stationary section formed on an inner region thereof and an operating section formed on an outer region thereof,
- wherein the translational mechanism comprises a cymbal mechanism disposed between the stationary section and the operating section such that the cymbal mechanism is connected at one side thereof to the stationary section and at the other side thereof to the operating section, and the rotational mechanism comprises a Scott-Russell linkage disposed on the stationary section.
Dependencies are inferred from the claim text.