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US 9,069,038 B2Granted
Test apparatus
AssigneeAdvantest Corporation
InventorsTakashi Kusaka, Masahiro Ishida
Life of this patent
Estimating the term…
Abstract
A main power supply is arranged such that its output terminal Po is connected to a power supply terminal of a DUT via a power supply line, and is configured to feedback control an output voltage VOUT output from the output terminal such that a detection value VDD′ that corresponds to a power supply voltage VDD at the power supply terminal approaches a target value VREF′. When a test pattern is supplied to the DUT, a power supply control unit is configured to feedforward control the main power supply such that the power supply voltage VDD approaches a predetermined target waveform VTGT.
Claims16
A test apparatus configured to test a device under test, comprising:
- a test unit configured to supply a predetermined test pattern to the device under test;
- a main power supply arranged such that its output terminal is connected to a power supply terminal of the device under test via a power supply line, and is configured to feedback control an output voltage output via the output terminal such that a detection value that corresponds to a power supply voltage at the power supply terminal approaches a target value;
- and
- a power supply control unit configured to feedforward control the main power supply such that the power supply voltage approaches a predetermined target waveform when the test unit supplies the test pattern to the device under test,
- wherein the main power supply comprises:
- an error signal generating unit configured to generate an error signal that corresponds to an error between the detection value and the target value;
- and
- a feedback output unit configured to feedback control the output voltage according to the error signal such that the error becomes zero,
- and wherein the power supply control unit is configured to superimpose on the target value a correction voltage that corresponds to the target waveform, and wherein the power supply control unit comprises:
- a first waveform acquisition unit configured to acquire a first waveform, which is a waveform of the power supply voltage supplied to the device under test in a state in which the target value set for the main power supply is fixed, when the device under test operates according to the test pattern;
- a target waveform acquisition unit configured to acquire the target waveform;
- and
- a correction voltage calculation unit configured to calculate the correction voltage based on the differential waveform between the first waveform and the target waveform.
10 more elements
A test apparatus configured to test a device under test, comprising:
- a test unit configured to supply a predetermined test pattern to the device under test;
- a main power supply arranged such that its output terminal is connected to a power supply terminal of the device under test via a power supply line, and is configured to feedback control an output voltage output via the output terminal such that a detection value that corresponds to a power supply voltage at the power supply terminal approaches a target value;
- and
- a power supply control unit configured to feedforward control the main power supply such that the power supply voltage approaches a predetermined target waveform when the test unit supplies the test pattern to the device under test,
- wherein the main power supply comprises:
- an error signal generating unit configured to generate an error signal that corresponds to an error between the detection value and the target value;
- and
- a feedback output unit configured to feedback control the output voltage according to the error signal such that the error becomes zero,
- and wherein the power supply control unit is configured to superimpose on the detection value a correction voltage that corresponds to the target waveform, and wherein the power supply control unit comprises:
- a first waveform acquisition unit configured to acquire a first waveform, which is a waveform of the power supply voltage supplied to the device under test in a state in which the target value set for the main power supply is fixed, when the device under test operates according to the test pattern;
- a target waveform acquisition unit configured to acquire the target waveform;
- and
- a correction voltage calculation unit configured to calculate the correction voltage based on the differential waveform between the first waveform and the target waveform.
10 more elements
A test apparatus configured to test a device under test, comprising:
- a test unit configured to supply a predetermined test pattern to the device under test;
- a main power supply arranged such that its output terminal is connected to a power supply terminal of the device under test via a power supply line, and is configured to feedback control an output voltage output via the output terminal such that a detection value that corresponds to a power supply voltage at the power supply terminal approaches a target value;
- and
- a power supply control unit configured to feedforward control the main power supply such that the power supply voltage approaches a predetermined target waveform when the test unit supplies the test pattern to the device under test, wherein the main power supply comprises:
- an error signal generating unit configured to generate an error signal that corresponds to the error between the detection value and the target value;
- and
- a feedback output unit configured to feedback control the output voltage according to the error signal such that the error becomes zero,
- and wherein at least one from among a transfer function of the error signal generating unit and a transfer function of the feedback output unit is configured to be adjustable,
- and wherein the power supply control unit is configured to control the transfer function of the error signal generating unit and the transfer function of the feedback output unit according to the target waveform.
6 more elements
Dependencies are inferred from the claim text.