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US 9,069,006 B2Granted
Self test of MEMS gyroscope with ASICs integrated capacitors
AssigneeFairchild Semiconductor Corporation
InventorsIon Opris, Justin Seng
Life of this patent
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Abstract
An apparatus includes a MEMS gyroscope sensor including a first sensing capacitor and a second sensing capacitor and an IC. The IC includes a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC, and a capacitance measurement circuit configured to measure capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.
Claims20
An apparatus comprising:
- a micro-electromechanical system (MEMS) gyroscope sensor including a first sensing capacitor and a second sensing capacitor;
- and
- an integrated circuit (IC), including:
- a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC;
- and
- a capacitance measurement circuit configured to measure a capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.
3 more elements
A method comprising:
- electrically decoupling a first sensing capacitor of an MEMS gyroscope sensor from an IC;
- applying a first electrical signal to the decoupled first sensing capacitor;
- and
- measuring a capacitance of a second sensing capacitor of the MEMS gyroscope sensor during application of the first electrical signal.
1 more element
Dependencies are inferred from the claim text.