Capacitance detector for accelerometer and gyroscope and accelerometer and gyroscope with capacitance detector

A device, comprising:

• a base substrate having a first bonding pad and a peripheral pad provided thereon, the peripheral pad encompassing the first bonding pad;
• a first acoustic resonator and a second acoustic resonator disposed on the base substrate;
• a lid substrate having a bonding pad seal and a peripheral pad seal provided thereon, the bonding pad seal bonding around the perimeter of the first bonding pad and the peripheral pad seal bonding with the peripheral pad to define a hermetically sealed volume between the lid substrate and the base substrate, the lid substrate defining a through hole therein positioned over the first bonding pad, the through hole providing access for an electrical connection to the first bonding pad;
• and
• electronic circuitry provided on a portion of a first surface of the lid substrate within the hermetically sealed volume, the electronic circuitry comprising:
• first oscillator circuitry electrically connected with the first acoustic resonator to form a first oscillator, the first oscillator further being electrically connected to a first capacitor of a teeter-totter capacitive transducer such that a first oscillator frequency of the first oscillator changes in response to a change in the capacitance of the first capacitor;
• and
• second oscillator circuitry electrically connected with the second acoustic resonator to form a second oscillator, the second oscillator further being electrically connected to a second capacitor of the teeter-totter capacitive transducer such that a second oscillator frequency of the second oscillator changes in response to a change in the capacitance of the second capacitor.