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US 9,069,004 B2Granted
Optomechanical sensors based on coupling between two optical cavities
AssigneeCornell University
InventorsSunil A. Bhave, David Neil Hutchison
Life of this patent
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Abstract
Methods, structures, devices and systems are disclosed for implementing optomechanical sensors in various configurations by using two optically coupled optical resonators or cavities that can be move or deform relative to each other. The optical coupling between first and second optical cavities to produce an optical resonance that varies with a spacing between the first and second optical cavities and provide the basis for the optomechanical sensing. Compact and integrated optomechanical sensors can be constructed to provide sensitive measurements for a range of applications, including motion sensing and other sensing applications.
Claims45
A device for optomechanical sensing of motion, comprising:
- a substrate on which a first optical cavity is fixed;
- a second optical cavity separated from the first optical cavity by a distance that provides optical coupling between first and second optical cavities to produce an optical resonance that varies with a spacing between the first and second optical cavities;
- a suspension coupled between the first and second optical cavities to allow the second optical cavity to move or deform with respect to the first optical cavity under action of a force to change the spacing between the first and second optical cavities;
- an optical coupler that couples light into and out of the first and second optical cavities;
- and
- a detection unit that is coupled to receive and detect light coming out of the optical coupler and extracts from the detected light a change in the optical resonance with respect to the spacing between the first and second optical cavities to measure motion based on the detected change.
3 more elements
A method for optomechanical sensing of motion, comprising:
- directing light into at least one of a first optical cavity and a second optical cavity that are optically coupled to each other and are structured to allow one to deform or move with respect to the other, wherein the first optical cavity and the second optical cavity are optically coupled to effectuate a single composite optical resonator having an optical resonance that varies with a spacing between the first and second optical cavities;
- coupling light out of the first and second optical cavities as sensor light;
- using the sensor light to detect a change in the optical resonance effectuated by the optical coupling between the first and second optical cavities with respect to a change of the spacing between the first and second optical cavities caused by a motion;
- and
- using the detected change in the optical resonance to measure the motion.
2 more elements
A device for optomechanical sensing of motion, comprising:
- a substrate;
- a first optical cavity formed on the substrate;
- a second optical cavity separated from the first optical cavity and optically coupled to the first optical cavity to cause the optically coupled first and second optical cavities to form a single composite optical resonator which exhibits an optical resonance that varies with a spacing between the first and second optical cavities, wherein the second optical cavity is configured to move or deform with respect to the first optical cavity under action of a force to change the spacing between the first and second optical cavities;
- an optical coupler that couples light into and out of the composite optical resonator;
- and
- a detection unit that is coupled to receive and detect light coming out of the optical coupler and extracts from the detected light a change in the optical resonance with respect to the spacing between the first and second optical cavities to measure motion in one or more directions within a plane parallel to the substrate based on the detected change.
3 more elements
A device for optomechanical sensing of motion, comprising:
- a substrate on which a first optical cavity is fixed;
- a second optical cavity separated from the first optical cavity by a distance that provides optical coupling between first and second optical cavities to effectuate a combination of optically coupled first and second optical cavities as a single composite optical resonator which exhibits an optical resonance that varies with a spacing between the first and second optical cavities;
- a suspension coupled between the first and second optical cavities to allow the second optical cavity to move or deform with respect to the first optical cavity under action of a force to change the spacing between the first and second optical cavities, thus allowing the optical resonance of the composite optical resonator to vary with the spacing;
- an optical coupler that couples light into and out of the first and second optical cavities;
- and
- a detection unit that is coupled to receive and detect light coming out of the optical coupler and extracts from the detected light a change in the optical resonance with respect to the spacing between the first and second optical cavities to measure motion based on the detected change.
3 more elements
Dependencies are inferred from the claim text.