Photo-acoustic gas sensor and method for the production and use thereof
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorWolfgang Schade
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Abstract
A photo-acoustic gas sensor and methods for producing same, the gas sensor having a resonance body and a device for detecting a vibration of the resonance body, including a device for optically detecting the location of at least one partial surface of the resonance body, wherein the resonance body and the device for detecting a vibration are disposed on exactly one substrate, the resonance body is formed by at least one first recess of the substrate, and the substrate is a semiconductor material.
Claims12
A photo-acoustic gas sensor, comprising a resonance body and an interferometer for identification of an oscillation of the resonance body by an optical detection of a location of at least one partial area of the resonance body, wherein the interferometer is arranged on exactly one substrate of a semiconductor material, and the resonance body is formed by at least one first cutout in the substrate which at least partly separates a first elongated element of the substrate from a portion of the substrate, wherein at least one of a device for generating light, a device for detecting light, a device for electronic signal processing, or a device for energy supply is integrated on the substrate of the semiconductor material.
Dependencies are inferred from the claim text.