US 9,068,923 B2Granted

Method for fabricating carbon nanotube array sensor

AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.

InventorYuan Yao

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Abstract

A method of fabricating a carbon nanotube array sensor includes the following steps. A carbon nanotube array, a first electrode and a second electrode are provided, the carbon nanotube array includes a plurality of carbon nanotubes. Each of the carbon nanotubes includes a first end and a second end opposite to the first end. A first metallophilic layer is formed on the first end of each of the carbon nanotubes. At least one first conductive metal layer is arranged between the first metallophilic layer and the first electrode to electrically connect each of the carbon nanotubes with the first electrode. A second metallophilic layer is formed on the second end of each of the carbon nanotubes. At least one second conductive metal layer is arranged between the second metallophilic layer and the second electrode to electrically connect each of the carbon nanotubes with the second electrode.

Claims14

Dependent claims

A method for fabricating a carbon nanotube array sensor, the method comprising the following steps:

providing a first electrode, a second electrode, and a carbon nanotube array, the carbon nanotube array comprising a plurality of carbon nanotubes, each of the carbon nanotubes comprising a first end and a second end opposite to the first end, the first and the second ends being arranged along a longitudinal axis of each of the carbon nanotubes;
forming a first metallophilic layer and a second metallophilic layer, wherein the first metallophilic layer is located on the first end of each of the carbon nanotubes, and the second metallophilic layer is located on the second end of each of the carbon nanotubes;
applying at least one first conductive metal layer between the first metallophilic layer and the first electrode, and at least one second conductive metal layer between the second metallophilic layer and the second electrode;
and
electrically connecting each of the carbon nanotubes with the first electrode, and with the second electrode;
and
forming a supporter between the first electrode and the second electrode, the supporter being spaced from the carbon nanotube array.

4 more elements

A method for fabricating a carbon nanotube array sensor, the method comprising:

growing a plurality of carbon nanotubes from a substrate, the carbon nanotubes having first free top ends;
forming first metallophilic layers on the first free top ends of the carbon nanotubes, the first metallophilic layers comprise a material selected from the group consisting of gold, graphite, palladium, chromium, nickel, titanium, and magnesium;
providing a first electrode and a second electrode;
arranging first conductive metal layers on the first free top ends of the carbon nanotubes, the first conductive metal layers having a lower melting point than that of the first electrode;
heating the first conductive metal layers to soften the first conductive metal layers such that the first free top ends of the carbon nanotubes electrically connect with the first electrode;
peeling off the substrate from the carbon nanotubes so that second free bottom ends of the carbon nanotubes are exposed;
forming second metallophilic layers on the second free bottom ends of the carbon nanotubes;
arranging second conductive metal layers on the second free bottom ends of the carbon nanotubes, the second conductive metal layers having a lower melting point than that of the second electrode;
heating the second conductive metal layers to soften the second conductive metal layers such that the second free bottom ends of the carbon nanotubes electrically connect with the second electrode;
and
forming a supporter between the first electrode and the second electrode, the supporter being spaced from the carbon nanotube array.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 12/732,123Filed 25 Mar 2010 · continuation
Priority: CN 2009 1 010548920 Feb 2009
Published: US 2010/0213954 A126 Aug 2010
Granted: 30 Jun 2015
Term ends: Not estimatedThe source records don’t support an estimate.

Classification3 codes

G01N 27/127
Composition of the body, e.g. the composition of its sensitive layer: comprising nanoparticles
G01N 27/414
Cells and electrode assemblies: ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
G01N
Investigating or analysing materials by determining their chemical or physical properties