X-ray imaging apparatus
AssigneeCanon Kabushiki Kaisha
InventorSoichiro Handa
Life of this patent
Estimating the term…
Abstract
An X-ray imaging apparatus for imaging an object to be inspected includes a grating that forms a periodic pattern using an X-ray from an X-ray source and a detector that detects the periodic pattern. In the X-ray imaging apparatus, when θ1 is an angle formed between a first direction, which is a periodic direction of the periodic pattern in a plane that is perpendicular to an optical axis of the X-ray, and a line parallel to an X-ray receiving surface of the detector in the plane, and θ2 is a grazing angle of the X-ray relative to the X-ray receiving surface, 1 sin 2 θ 1 sin 2 θ 2 + cos 2 θ 1 > 2 holds. Also in the X-ray imaging apparatus, an angle formed between a surface of the grating and the optical axis of the X-ray is from 45 to 90°.
Claims20
An X-ray imaging apparatus for imaging an object to be inspected, the apparatus comprising:
- a grating that forms a periodic pattern using an X-ray from an X-ray source;
- and
- a detector that detects the periodic pattern,
- wherein, when θ1 is an angle formed between a first direction and a line, the first direction being a periodic direction of the periodic pattern in a plane perpendicular to an optical axis of the X-ray, the line being parallel to an X-ray receiving surface of the detector in the plane, and θ2 is a grazing angle of the X-ray relative to the X-ray receiving surface,
- 1
- sin
- 2
-
- θ
- 1
-
- sin
- 2
-
- θ
- 2
- +
- cos
- 2
-
- θ
- 1
- >
- 2
- holds, and
- wherein an angle formed between a surface of the grating and the optical axis of the X-ray is from 45 to 90°.
An X-ray imaging apparatus for imaging an object to be inspected, the apparatus comprising:
- a grating that forms a periodic pattern using an X-ray from an X-ray source;
- and
- a detector that detects the periodic pattern,
- wherein, when θ1 is an angle formed between a first direction and a line, the first direction being a periodic direction of the periodic pattern in a plane that is perpendicular to an optical axis of the X-ray, the line being parallel to an X-ray receiving surface of the detector in the plane, θ2 is a grazing angle of the X-ray relative to the X-ray receiving surface, p0 is a pitch of the periodic pattern in the first direction in a plane that is perpendicular to the optical axis of the X-ray and intersects the X-ray receiving surface, and R is a minimum resolvable length on the X-ray receiving surface in a direction corresponding to the first direction, θ2 is greater than 0° and smaller than 30°, and
- p
- 0
- sin
- 2
-
- θ
- 1
-
- sin
- 2
-
- θ
- 2
- +
- cos
- 2
-
- θ
- 1
- ≥
- R
- holds, and
- wherein an angle formed between a surface of the grating and the optical axis of the X-ray is from 45 to 90°.
An X-ray apparatus comprising:
- a grating that forms a periodic pattern using an X-ray from an X-ray source;
- and
- a detector that detects the periodic pattern,
- wherein, when θ1 is an angle formed between a first direction and a line, the first direction being a periodic direction of the periodic pattern in a plane perpendicular to an optical axis of the X-ray, the line being parallel to an X-ray receiving surface of the detector in the plane, and θ2 is a grazing angle of the X-ray relative to the X-ray receiving surface,
- 1
- sin
- 2
-
- θ
- 1
-
- sin
- 2
-
- θ
- 2
- +
- cos
- 2
-
- θ
- 1
- >
- 2
- holds.
An X-ray apparatus comprising:
- a grating that forms a periodic pattern using an X-ray from an X-ray source;
- and
- a detector that detects the periodic pattern,
- wherein, when θ1 is an angle formed between a first direction and a line, the first direction being a periodic direction of the periodic pattern in a plane that is perpendicular to an optical axis of the X-ray, the line being parallel to an X-ray receiving surface of the detector in the plane, θ2 is a grazing angle of the X-ray relative to the X-ray receiving surface, p0 is a pitch of the periodic pattern in the first direction in a plane that is perpendicular to the optical axis of the X-ray and intersects the X-ray receiving surface, and R is a minimum resolvable length on the X-ray receiving surface in a direction corresponding to the first direction, θ2 is greater than 0° and smaller than 30° , and
- p
- 0
- sin
- 2
-
- θ
- 1
-
- sin
- 2
-
- θ
- 2
- +
- cos
- 2
-
- θ
- 1
- ≥
- R
- holds.
Dependencies are inferred from the claim text.