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US 9,068,914 B2Granted
Nanogap sensor and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJeo-young Shim, Tae-han Jeon, Kun-sun Eom, Dong-ho Lee, Hee-jeong Jeong, Seong-ho Cho
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Abstract
A nanogap sensor includes a first layer in which a micropore is formed; a graphene sheet disposed on the first layer and including a nanoelectrode region in which a nanogap is formed, the nanogap aligned with the micropore; a first electrode formed on the grapheme sheet; and a second electrode formed on the graphene sheet, wherein the first electrode and the second electrode are connected to respective ends of the nanoelectrode region.
Claims22
A nanogap sensor comprising:
- a micropore layer comprising a micropore;
- a graphene sheet disposed on the micropore layer and comprising a nanoelectrode region, wherein the nanoelectrode region comprises a nanogap aligned with the micropore;
- a first electrode disposed on the graphene sheet;
- and
- a second electrode disposed on the graphene sheet, wherein the first electrode and the second electrode are connected to the nanoelectrode region at opposite ends of the nanoelectrode region relative to the nanogap,
- wherein a region of the graphene sheet other than the nanoelectrode region is an electrically inactive region.
3 more elements
A method of manufacturing a nanogap sensor, the method comprising:
- forming a micropore layer on a substrate, wherein the micropore layer comprises an insulating material;
- forming a nanoelectrode on the micropore layer, wherein the nanoelectrode comprises graphene;
- forming a micropore in the micropore layer, wherein the micropore perforates the micropore layer;
- and
- forming a nanogap in the nanoelectrode, wherein the nanogap perforates the nanoelectrode and is aligned with the micropor,
- wherein forming the nanoelectrode comprises:
- forming a graphene sheet on the micropore layer;
- forming a metal layer on the graphene sheet;
- patterning the metal layer in a structure comprising a nanoregion and a first electrode and a second electrode connected to respective ends of the predetermined nanoregion to expose a portion of the graphene sheet;
- and
- electrically inactivating the exposed portion of the graphene sheet.
8 more elements
Dependencies are inferred from the claim text.