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US 9,068,871 B2Granted
Flow rate measuring device
AssigneeOMRON Corporation
InventorsKatsuyuki Yamamoto, Naotsugu Ueda
Life of this patent
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Abstract
A flow rate measuring device includes: a flow rate sensor; a physical property sensor having a micro heater and a thermopile; and a sub-flow path portion having a physical property detecting flow path in which the physical property sensor is disposed. The micro heater and the thermopile are disposed side by side in a direction orthogonal to a flow direction of a fluid to be measured, and the flow rate sensor is disposed at a position except for the physical property detecting flow path.
Claims15
A flow rate measuring device comprising:
- a flow rate detection unit configured to detect a flow rate of a fluid to be measured the fluid to be measured is the fluid flowing through a main flow path;
- a physical property detection unit configured to detect a physical property of the fluid to be measured, the physical property detection unit comprising a heating unit configured to heat the fluid to be measured and a temperature detection unit configured to detect a temperature of the fluid to be measured;
- a sub-flow path portion in which one end is in fluid communication with a first inflow port open in the main flow path and the other end is in fluid communication with a first outflow port open in the main flow path, the sub-flow path portion comprising a physical property detection flow path in which the physical property detection unit is disposed;
- and
- a flow rate correction unit configured to correct the flow rate of the fluid to be measured, the flow rate being calculated based on a detection signal outputted from the flow rate detection unit, by using the physical property of the fluid to be measured, the physical property being calculated based on a detection signal outputted from the physical property detection unit, wherein
- the heating unit and the temperature detection unit are disposed side by side in a direction orthogonal to a flow direction of the fluid to be measured, and
- the flow rate detection unit is disposed at a position except for the physical property detection flow path.
4 more elements
Dependencies are inferred from the claim text.