US 9,068,835 B2 · Functional element, sensor element, electronic apparatus, and method for producing a functional element

Abstract

A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section.

Claims18

Dependent claims

A functional element comprising:

a substrate having a principal surface on which a groove portion is provided, the groove portion in which a wiring line is provided;
and
a fixed electrode section laid across the groove portion on the substrate,
wherein
in a connection between the fixed electrode section and the wiring line, a raised portion formed by using at least one of the substrate and the fixed electrode section is disposed,
the raised portion is formed integrally with the substrate, and
an end face of the raised portion is flush with the principal surface of the substrate.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

13/449,619Filed 18 Apr 2012

Priority

JP 2011-09423220 Apr 2011

Published

US 2012/0267150 A125 Oct 2012

Granted

30 Jun 2015

Term ends

Not estimatedThe source records don’t support an estimate.

Classification8 codes

G01C 19/5783
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: mountings or housings not specific to…
G01P 15/0802
With conversion into electric or magnetic values: details
G01P 15/125
With conversion into electric or magnetic values: by capacitive pick-up
H05K 1/118
Printed elements for providing electric connections to or between printed circuits: specially for flexible printed circuits, e.g. using folded…

Functional element, sensor element, electronic apparatus, and method for producing a functional element

Life of this patent

Functional element, sensor element, electronic apparatus, and method for producing a functional element

Life of this patent

Abstract

Claims18