Layered object and measuring apparatus and method

A measuring apparatus configured to identify a material and thickness of each of a plurality of layers included in a layered body, based on a measurement result obtained by measuring a time domain waveform of an electromagnetic wave pulse from the layered body, comprising:

• a database configured to store data of a plurality of material candidates and a plurality of thickness candidates;
• an input unit configured to input a search range of the data of the plurality of material candidates and the plurality of thickness candidates stored in the database;
• and
• a processing unit configured to reproduce a time domain waveform of an electromagnetic wave pulse from the layered body by employing data of a plurality of material candidates and a plurality of thickness candidates within the search range, and to compare this reproduced time domain waveform and the time domain waveform of the measurement result, thereby identifying the material and thickness of each of the plurality of layers.