Sliding member and fluid dynamic pressure bearing apparatus
AssigneeMinebea Co., Ltd.
InventorsShinichi Niwa, Eiji Fujimoto, Toshiaki Asakawa
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Abstract
There is provided a sliding member including: a substrate; and a protective film provided on the substrate, wherein the protective film is composed only of a metal base layer provided on the substrate, a low-hardness diamond-like carbon layer provided as a single layer on the metal base layer, and a high-hardness diamond-like carbon layer provided as a single layer directly on the low-hardness diamond-like carbon layer. The sliding member has the protective film which has excellent frictional wear resistance property and satisfactory adhesion property to the substrate, regardless of having a simple structure.
Claims15
A sliding member comprising:
- a substrate;
- and
- a protective film provided on the substrate, the protective film consisting of a metal base layer provided on the substrate, one low-hardness diamond-like carbon layer provided on the metal base layer, and one high-hardness diamond-like carbon layer provided directly on the low-hardness diamond-like carbon layer, wherein
- the high-hardness diamond-like carbon layer has a homogenous structure within the high-hardness diamond-like carbon layer,
- the low-hardness diamond-like carbon layer has a columnar structure in which a plurality of streaks extend in a thickness direction of the low-hardness diamond-like carbon layer, and
- a hardness of the high-hardness diamond-like carbon layer is not less than 28 GPa, and a hardness of the low-hardness diamond-like carbon layer is not more than 17 GPa.
A sliding member, comprising:
- a substrate;
- and
- a protective film provided on the substrate, the protective film consisting of a metal base layer, a first diamond-like carbon layer which has a columnar structure in which a plurality of streaks extend in a thickness direction of the first diamond-like carbon layer and which is formed on the metal base layer, and a second diamond-like carbon layer which has a homogeneous structure and which is formed on the first diamond-like carbon layer.
Dependencies are inferred from the claim text.