Apparatus for manufacturing single-crystal silicon carbide

An apparatus for manufacturing single-crystal silicon carbide, said apparatus comprising:

• at least a crucible for accommodating silicon carbide feedstock powder and seed crystal;
• heat insulation material installed around the crucible;
• and
• a heating device for heating the crucible, wherein the crucible is heated by passing high-frequency electric current through a work coil installed around the crucible,
• wherein
• the outer profile of the crucible includes at least one region of narrower diameter than a vertically adjacent region at a vertically adjacent higher region,
• the insulation material is also installed in the space left by the diameter difference, and
• a thickness of the insulation material at the narrower diameter region is greater than that of the insulation material at the vertically adjacent region, and
• wherein:
• the crucible is provided with a cover member, to an inner surface of which a seed crystal is attached at a top side thereof,
• the crucible is provided with a portion in which silicon carbide feedstock is charged at a bottom side thereof, and
• a ratio of maximum heat insulation material thickness to minimum heat insulation material thickness (max. thickness/min. thickness) is 1.5 or greater.

An apparatus for manufacturing single-crystal silicon carbide, said apparatus comprising:

• a crucible for accommodating silicon carbide feedstock powder and seed crystal;
• heat insulation material around the outside of the crucible;
• and
• a heating device for heating the crucible, wherein the crucible is heated by passing high-frequency electric current through a work coil installed around the crucible,
• wherein:
• an outer profile of the crucible includes a small-diameter region having a narrower diameter than a large-diameter region located vertically adjacent to the small-diameter region,
• heat insulation material is installed in a radial space resulting from a diameter difference between the large-diameter region and the small-diameter region,
• a thickness of the insulation material at the small-diameter region is greater than that of the insulation material at the large-diameter region, and
• a ratio of maximum heat insulation material thickness to minimum heat insulation material thickness (max. thickness/min. thickness) is 1.5 or greater.