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US 9,068,265 B2Granted
Gas distribution plate with discrete protective elements
AssigneeApplied Materials, Inc.
InventorsDmitry Lubomirsky, Kartik Ramaswamy, Kallol Bera, Jennifer Sun
Life of this patent
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Abstract
Embodiments of the present invention provide a gas distribution plate assembly having protective elements for plasma processing. The gas distribution plate assembly includes a base plate having a front side and a backside, and a plurality of protective elements in direct contact with the base plate. The protective elements cover the front side of the base plate to protect the base plate from a plasma processing environment during use.
Claims20
A gas distribution plate assembly comprising:
- a base plate having a plurality of gas delivery holes extending from a backside to a front side of the base plate;
- a plurality of protective elements in direct contact with the base plate, the protective elements substantially covering the front side of the base plate and having a top surface facing away from the front side of the base plate;
- and
- a plurality of gas delivery paths extending from the backside of the base plate to the top surface of the protective elements, the plurality of gas delivery holes forming a portion of the gas delivery paths.
1 more element
A gas distribution plate assembly comprising:
- an RF conductive base plate having a front side and a backside;
- and
- a plurality of plasma resistive protective elements directly in contact with the base plate and covering the front side of the base plate to define a top surface of the gas distribution plate assembly, wherein a plurality of gas distribution paths extend from the backside of the base plate to the top surface of gas distribution plate assembly.
Dependencies are inferred from the claim text.