AC power supply for sputtering apparatus
AssigneeUlvac, Inc.
InventorYoshio Yanagiya
Life of this patent
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Abstract
There is provided an AC power supply for a sputtering apparatus in which the AC power supply can prevent the induction of an arc discharge by suppressing an overvoltage to be generated when the polarity of each electrode is reversed. A bridge circuit made up of a plurality of switching transistors SW1-SW4 is disposed between positive and negative DC current output lines from a DC electric power supply source. An inductor DCL which makes a DC output to have a constant-current characteristic is disposed in at least one of the positive and the negative DC output lines from the DC electric power supply source to the bridge circuit, and a snubber circuit is disposed in parallel with inputs of the bridge circuit.
Claims2
An AC power supply for a sputtering apparatus, the power supply comprising a DC electric power supply source and a bridge circuit made up of a plurality of switching elements connected between positive and negative DC outputs from the DC electric power supply source to supply bipolar pulsed electric power to two sputtering targets contacting a plasma at a predetermined frequency by switching each of the switching elements of the bridge circuit, wherein the AC power supply comprises:
- an inductor having a predetermined inductance value, the inductor being disposed in at least one of the positive and the negative DC outputs from the DC electric power supply source to the bridge circuit;
- and
- a snubber circuit in parallel with inputs to the bridge circuit,
- wherein the snubber circuit is disposed between the inductor and the bridge circuit, the snubber circuit having a diode and a capacitor connected in series with each other, the snubber circuit further having a resistor one end of which is in connection between the diode and the capacitor and an opposite end of which is in connection between the DC electric power supply source and the inductor.
Dependencies are inferred from the claim text.