Compositions for antireflective coatings
AssigneesDow Global Technologies LLC, Rohm and Haas Electronic Materials LLC
InventorsJessica P. Evans, Christopher P. Sullivan
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AssigneesDow Global Technologies LLC, Rohm and Haas Electronic Materials LLC
InventorsJessica P. Evans, Christopher P. Sullivan
Estimating the term…
A composition comprising the following: A) a cure catalyst selected from Formula A: [NR1′R2′R3′R4′]+X− (Formula A), R1′, R2′, R3′, R4′ are each independently selected from hydrogen, alkyl, substituted alkyl, aryl, or substituted aryl; X is a monovalent anion, and wherein at least one of R1′, R2′, R3′ or R4′ is a methyl; and B) a prepolymer formed from a first composition comprising: Ra comprises one or more multiple bonds, provided that, if Ra comprises more than one multiple bond, these multiple bonds are not in a conjugated configuration; R1, R2, R3 are described herein; Rb is selected from H or a saturated group comprising alkyl, alkylene, or alkylidene; R4, R5, R6 are described herein; Rc comprises more than one multiple bond, and these multiple bonds are in a conjugated configuration; R7, R8, R9 are described herein; and R10, R11, R12, R13 described herein.
A composition comprising at least the following:
A composition comprising at least the following:
Dependencies are inferred from the claim text.