Laser conversion of high purity silicon powder to densified granular forms
AssigneeSemlux Technologies, Inc.
InventorsAlleppey V. Hariharan, Jagannathan Ravi
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AssigneeSemlux Technologies, Inc.
InventorsAlleppey V. Hariharan, Jagannathan Ravi
Estimating the term…
The present invention relates to a direct method to convert fine and ultra fine silicon powder from polysilicon manufacturing sources such as fluid bed and free space reactors into densified granular forms. This conversion process is effected by the use of lasers of selective wavelengths from solid state diode or optically-pumped YAG sources to locally heat, melt and densify a controlled quantity of silicon powder, and comprises the steps of distributing dry silicon powder on an inert substrate, subjecting the silicon charge to a focused laser beam to realize melted and densified granular forms, and discharging the product. When adapted to high purity silicon powder, the end use for the densified silicon granular forms is primarily as feedstock for silicon-based semiconductor and photovoltaic manufacturing industries. The process, suitably modified, is adaptable to form other silicon body shapes and components.
A method for converting high purity silicon powder into a polysilicon granule of a desired size and of a desired shape, the method comprising:
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