MEMS device, electronic module, electronic apparatus, and mobile unit
AssigneeSeiko Epson Corporation
InventorsMakoto Furuhata, Satoru Tanaka
Life of this patent
Estimating the term…
Abstract
A MEMS device includes: a base substrate; a first wiring disposed on the base substrate using a first structure; a second wiring disposed on the base substrate using the first structure and a second structure connected to the first structure; and a MEMS element connected with the first wiring and the second wiring and arranged on the base substrate, wherein the first wiring and the second wiring include a crossing portion where the first wiring and the second wiring cross each other, and at the crossing portion, the first structure of the first wiring and the second structure of the second wiring cross each other.
Claims14
A MEMS device comprising:
- a base substrate;
- a first wiring disposed on the base substrate using a first structure, wherein a groove portion is disposed on the base substrate, and the first structure is disposed in the groove portion;
- a second wiring disposed on the base substrate using the first structure and a second structure connected to the first structure;
- and
- a MEMS element connected with the first wiring and the second wiring and arranged on the base substrate, wherein
- the first wiring and the second wiring include a crossing portion where the first wiring and the second wiring cross each other,
- at the crossing portion, the first structure of the first wiring and the second structure of the second wiring cross each other, and
- the groove portion at the crossing portion is deeper than the groove portion at the other portions.
A MEMS device comprising:
- a base substrate;
- a first wiring disposed on the base substrate using a first structure, wherein a groove portion is disposed on the base substrate, and the first structure is disposed in the groove portion;
- a second wiring disposed on the base substrate using the first structure and a second structure connected to the first structure;
- and
- a MEMS element connected with the first wiring and the second wiring and arranged on the base substrate, wherein
- the first wiring and the second wiring include a crossing portion where the first wiring and the second wiring cross each other,
- at the crossing portion, the first structure of the first wiring and the second structure of the second wiring cross each other, and
- the second structure is not disposed in the groove portion at the crossing portion.
A MEMS device comprising;
- a base substrate;
- a first wiring disposed on the base substrate using a first structure;
- a second wiring disposed on the base substrate using a second structure;
- and
- a MEMS element connected with the first wiring and the second wiring and arranged on the base substrate, wherein
- the first wiring and the second wiring include a crossing portion where the first wiring and the second wiring cross each other, and
- at the crossing portion, the first structure of the first wiring and the second structure of the second wiring cross each other, wherein
- a groove portion is disposed on the base substrate, and the first structure is disposed in the groove portion and the second structure is not disposed in the groove portion at least at the crossing portion.
Dependencies are inferred from the claim text.