Method for producing fine convex pattern structure and fine convex pattern production system
AssigneeDai Nippon Printing Co., Ltd.
InventorsHiroyuki Naganuma, Yuki Aritsuka, Mikio Ishikawa
Life of this patent
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Abstract
A method for producing a fine convex pattern structure having a fine convex pattern projecting from a flat portion in a predetermined direction with respect to the flat portion includes: using an imprint mold that has a fine concave pattern corresponding to the fine convex pattern and forming the fine convex pattern projecting from the flat portion under a condition in which the fine convex pattern is inclined to the flat portion side from the predetermined direction; and causing the fine convex pattern to project in the predetermined direction with respect to the flat portion by inducing electric charges at least on the inclined fine convex pattern.
Claims14
A method for producing a fine convex pattern structure having a flat portion and a fine convex pattern projecting from the flat portion in a predetermined direction with respect to the flat portion,
- the method comprising:
- using an imprint mold that has a fine concave pattern corresponding to the fine convex pattern, and forming the fine convex pattern projecting from the flat portion under a condition in which the fine convex pattern is inclined to the flat portion side from the predetermined direction;
- and
- causing the fine convex pattern to project in the predetermined direction with respect to the flat portion by inducing electric charges at least on the inclined fine convex pattern.
A method for producing a fine convex pattern structure having a flat portion and a fine convex pattern projecting from the flat portion in a predetermined direction with respect to the flat portion, with at least the fine convex pattern being constituted by a resin material that can be shrunk by energy from outside,
- the method comprising:
- using an imprint mold having a fine concave pattern corresponding to the fine convex pattern, and forming the fine convex pattern projecting from the flat portion under a condition in which the fine convex pattern is inclined to the flat portion from the predetermined direction;
- and
- causing the fine convex pattern to project in the predetermined direction with respect to the flat portion by imparting the energy from the outside to a relatively extended side surface from among side surfaces of the inclined fine convex pattern.
A system for producing a fine convex pattern structure having a flat portion and a fine convex pattern projecting from the flat portion in a predetermined direction with respect to the flat portion,
- the system comprising:
- an inclined pattern formation unit that uses an imprint mold having a fine concave pattern corresponding to the fine convex pattern, and forms a fine convex pattern projecting from the flat portion under a condition in which the fine convex pattern is inclined to the flat portion side from the predetermined direction;
- and
- an electric charge imparting unit that causes the fine convex pattern to project in the predetermined direction with respect to the flat portion by inducing electric charges at least on the inclined fine convex pattern.
A system for producing a fine convex pattern structure that has a flat portion and a fine convex pattern projecting from the flat portion in a predetermined direction with respect to the flat portion, with at least the fine convex pattern being constituted by a resin material that can be shrunk by energy from outside,
- the system comprising:
- an inclined pattern formation unit that uses an imprint mold having a fine concave pattern corresponding to the fine convex pattern, and forms a fine convex pattern projecting from the flat portion under a condition in which the fine convex pattern is inclined to the flat portion side from the position of the predetermined direction;
- and
- an energy imparting unit that causes the fine convex pattern to project in the predetermined direction with respect to the flat portion by imparting energy from outside to a relatively extended side surface, from among side surfaces of the inclined fine convex pattern formed by the inclined pattern formation unit.
Dependencies are inferred from the claim text.