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US 9,067,299 B2Granted
Printed chemical mechanical polishing pad
AssigneeApplied Materials, Inc.
InventorsRajeev Bajaj, Barry Lee Chin, Terrance Y. Lee
Life of this patent
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Abstract
A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a pad material precursor from a nozzle and solidifying the pad material precursor to form a solidified pad material.
Claims21
A method of fabricating a polishing layer of a polishing pad, comprising:
- successively depositing a plurality of layers with a 3D printer, each layer of the plurality of layers deposited by
- spreading a layer of powder across an underlying layer of the plurality of layers, the layer of powder including a powdered material and abrasive particles,
- ejecting droplets of a binder material from a nozzle onto the layer of powder, the powdered material and binder material providing a pad material precursor, and
- solidifying the pad material precursor to form a solidified pad material having a matrix of bonded material formed from the powdered material and the binder material, and the abrasive particles held in the matrix.
1 more element
A method of fabricating a polishing layer of a polishing pad, comprising:
- successively depositing a plurality of layers with a 3D printer, each layer of the plurality of layers deposited by
- ejecting liquid droplets of a pad material precursor from a nozzle directly onto an underlying layer of solidified pad material without a layer of powder, and
- solidifying the pad material precursor to form a layer of solidified pad material, wherein solidifying the pad material precursor comprises curing the pad material precursor.
A method of fabricating a polishing pad, comprising:
- forming a backing layer of the polishing pad by successively depositing a first plurality of layers with a 3D printer, wherein each layer of the first plurality of layers is deposited ejecting droplets of a backing layer precursor from a nozzle;
- and
- forming a polishing layer by successively depositing a second plurality of layers with the 3D printer over the first plurality of layers, wherein each layer of the second plurality of layers is deposited by ejecting droplets of a polishing layer precursor from a nozzle;
- and
- wherein the backing layer precursor is a same precursor as the polishing layer precursor, and wherein the backing layer is formed with at least one of a different porosity or different degree of curing than the polishing layer such that the backing layer is softer than the polishing layer.
2 more elements
Dependencies are inferred from the claim text.