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US 9,067,228 B2Granted
Moisture protection of fluid ejector
AssigneeFUJIFILM Corporation
InventorsChristoph Menzel, Andreas Bibl, Paul A. Hoisington
Life of this patent
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Abstract
A fluid ejection apparatus includes a substrate having a plurality of fluid passages for fluid flow and a plurality of nozzles fluidically connected to the fluid passages, a plurality of actuators positioned on top of the substrate to cause fluid in the plurality of fluid passages to be ejected from the plurality of nozzles, and a protective layer formed over at least a portion of the plurality of actuators, the protective layer having an intrinsic permeability to moisture less than 2.5×10−3 g/m·day.
Claims18
A fluid ejection apparatus comprising:
- a substrate having a plurality of fluid passages for fluid flow and a plurality of nozzles fluidically connected to the fluid passages;
- a plurality of actuators positioned on top of the substrate to cause fluid in the plurality of fluid passages to be ejected from the plurality of nozzles;
- the plurality of actuators comprising traces, electrodes and a piezoelectric material;
- a first protective layer of a first material formed over the traces, and
- a second protective layer of a second material formed only over the electrodes and the piezoelectric material, the second material having an intrinsic permeability to moisture that is less than that of the first material.
2 more elements
A fluid ejection apparatus comprising:
- a substrate having a plurality of fluid passages for fluid flow, a pumping chamber, and a plurality of nozzles fluidically connected to the fluid passages and the pumping chamber;
- a plurality of actuators positioned on top of the substrate to cause fluid in the plurality of fluid passages to be ejected from the plurality of nozzles;
- the plurality of actuators comprising traces, electrodes and a piezoelectric material;
- a first protective layer of a first material formed over the traces;
- and
- a second protective layer of a second material formed only to overlay the pumping chamber but not over the traces, the electrodes and the piezoelectric material being disposed over the pumping chamber, wherein the first material is a polymer and the second material is an oxide, nitride or oxynitride.
3 more elements
Dependencies are inferred from the claim text.