Manufacturing method and manufacturing apparatus of functional element
AssigneeKabushiki Kaisha Toshiba
InventorsHiroshi Tomita, Hisashi Okuchi, Yasuhito Yoshimizu, Yusuke Tanaka
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Abstract
According to one embodiment, the manufacturing method of a functional element includes filling a solvent comprising hydrogen gas and having organic molecules dispersed therein into a gap between the first electrode and the second electrode formed facing the first electrode, and forming an organic layer containing the organic molecules mentioned above between the first electrode and the second electrode.
Claims15
A manufacturing method for a functional element, comprising:
- forming a first electrode and a second electrode facing the first electrode;
- filling a gap between the first electrode and the second electrode with a solvent including hydrogen gas and organic molecules dispersed therein;
- and
- forming an organic layer containing the organic molecules between the first electrode and the second electrode.
A manufacturing method for a functional element, comprising:
- forming a first electrode and a second electrode facing the first electrode;
- filling a gap between the first electrode and the second electrode with a solvent including hydrogen gas and organic molecules dispersed therein;
- rinsing the gap between the first electrode and the second electrode with water doped with hydrogen gas;
- and
- forming an organic layer containing the organic molecules between the first electrode and the second electrode.
A manufacturing method for a functional element, comprising:
- forming a first electrode and a second electrode facing the first electrode;
- applying a solvent including hydrogen gas and organic molecules dispersed therein to a surface of the first electrode and the second electrode;
- and
- forming an organic layer containing the organic molecules between the first electrode and the second electrode after applying the solvent, wherein the organic layer contacts the surface of the first electrode without contacting the surface of the second electrode.
Dependencies are inferred from the claim text.