Compression member for use in showerhead electrode assembly
AssigneeLam Research Corporation
InventorsDarrell Ehrlich, Daniel Arthur Brown, Ian Kenworthy
Life of this patent
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Abstract
A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.
Claims16
A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber wherein the member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate supported below a temperature-controlled top plate, the member comprising:
- a body of electrically insulating elastomeric material configured to fit between the temperature-controlled top plate and the thermal control plate such that a lower surface of the body contacts an upper surface of the film heater and applies a compression force to a portion of the film heater adjacent a power supply boot which supplies power to the film heater.
A temperature-controlled showerhead electrode assembly comprising:
- a temperature-controlled top plate;
- a showerhead electrode;
- a thermal control plate attached to the temperature-controlled top plate and showerhead electrode so as to provide a thermal path between the showerhead electrode and the temperature-controlled top plate;
- a film heater on an upper surface of the thermal control plate;
- power supply boots on the thermal control plate and electrically connected to sections of the film heater;
- and
- compression members configured to fit between the temperature-controlled top plate and the thermal control plate such that a lower surface of each compression member contacts an upper surface of the film heater, adjacent a respective power supply boot on the thermal control plate wherein a compression force is applied to a portion of the film heater surrounding each power supply boot.
Dependencies are inferred from the claim text.