Nanostructure field emission cathode structure and method for making
AssigneeUniversity Health Network
InventorsYonghai Sun, Tze-wei Yeow, David Anthony Jaffray
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Abstract
Various embodiments are described herein for nanostructure field emission cathode structures and methods of making these structures. These structures generally comprise an electrode field emitter comprising a resistive layer having a first surface, a connection pad having a first surface disposed adjacent to the first surface of the resistive layer, and a nanostructure element for emitting electrons in use, the nanostructure element being disposed adjacent to a second surface of the connection pad that is opposite the first surface of the connection pad. Some embodiments also include a coaxial gate electrode that is disposed about the nanostructure element.
Claims39
An electrode field emitter comprising:
- a resistive layer having a first surface;
- a connection layer having a first surface disposed adjacent to the first surface of the resistive layer, the connection layer being patterned to form a single connection pad;
- and
- a single nanostructure element for emitting electrons during use, the single nanostructure element being disposed adjacent to a second surface of the single connection pad that is opposite the first surface of the connection pad, the single nanostructure element having, a diameter that is smaller than a diameter of the single connection pad.
The emitter of claim wherein the resistive layer is patterned to the same pattern of the connection pad.
A field electron emission device comprising:
- a cathode comprising:
- a conductive layer forming a first electrode having a first surface and a second surface,
- a resistive layer having a first surface adjacent to the second surface of the conductive layer;
- an emitter array of nanostructure electrode field emitters disposed on a second surface of the resistive layer opposite the first surface of the resistive layer, each field emitter comprising:
- a connective layer disposed on the second surface of the resistive layer, the connective layer being patterned to form a single connection pad;
- and
- a single nanostructure element for emitting electrons during use, the single nanostructure element being disposed on the single connection pad, the single nanostructure element having a diameter that is smaller than a diameter of the single connection pad;
- and
- an anode that is in electrical communication with the cathode during use.
A method of forming an electrode field emitter, the method comprising:
- forming a resistive layer with a flat surface;
- forming a single connection pad on the resistive layer;
- forming a single catalyst dot on the single connection pad;
- and
- growing a single nanostructure element at approximately a center of the single connection pad, the single nanostructure element being used for emitting electrons during use, the single nanostructure element being grown to have a diameter that is smaller than a diameter of the single connection pad.
Dependencies are inferred from the claim text.