Semiconductor device and manufacturing method thereof
AssigneeAmkor Technology, Inc.
InventorsJong Sik Paek, Won Chul Do, Doo Hyun Park, Eun Ho Park, Sung Jae Oh
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AssigneeAmkor Technology, Inc.
InventorsJong Sik Paek, Won Chul Do, Doo Hyun Park, Eun Ho Park, Sung Jae Oh
Estimating the term…
A semiconductor device including a relatively thin interposer excluding a through silicon hole and a manufacturing method thereof are provided. The method includes forming an interposer on a dummy substrate. The forming of the interposer includes, forming a dielectric layer on the dummy substrate, forming a pattern and a via on the dielectric layer, and forming a seed layer at the pattern and the via of the dielectric layer and forming a redistribution layer and a conductive via on the seed layer. A semiconductor die is connected with the conductive via facing an upper portion of the interposer, and the semiconductor die is encapsulated with an encapsulant. The dummy substrate is removed from the interposer. A bump is connected with the conductive via facing a lower portion of the interposer.
A method of manufacturing a semiconductor device, the method comprising:
A semiconductor device comprising:
A method of manufacturing a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.