# US 9,041,006 B2 · Silicon carbide MOS semiconductor device

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- Number: US 9,041,006 B2
- Document ID: US9041006B2
- Status: Granted
- Kind: B2
- Application number: 12/409,964
- Filed: 2009-03-24
- Published: 2009-09-24
- Granted: 2015-05-26
- Earliest claimed: 2008-03-24
- Assignees: Fuji Electric Co., Ltd.
- Applicants: Shun-ichi Nakamura; Yoshiyuki Yonezawa; Masahide Gotoh
- Inventors: Shun-ichi Nakamura; Yoshiyuki Yonezawa; Masahide Gotoh
- Web page: https://patentgrep.com/patent/US9041006B2

## CPC

- H10D 30/668: {having trench gate electrodes, e.g. UMOS transistors}
- H10D 8/051: {of Schottky diodes}
- H10D 8/422: {PN diodes having the PN junctions in mesas}
- H10D 12/031: {of IGBTs}
- H10D 62/153: {Impurity concentrations or distributions}
- H10D 62/8325: {Silicon carbide}
- H10P 30/2042: {into crystalline silicon carbide}
- H10P 30/21: {of electrically active species}
- H10D 8/045: {of PN junction diodes}
- H10D 12/038: {having a recessed gate, e.g. trench-gate IGBTs}
- H10D 30/0297: {using recessing of the gate electrodes, e.g. to form trench gate electrodes}
- H10D 62/107: {Buried supplementary regions, e.g. buried guard rings (multi-RESURF H10D62/111)}
- H10D 62/157: {Impurity concentrations or distributions}
- H10D 64/513: {within recesses in the substrate, e.g. trench gates, groove gates or buried gates}
- H10D 64/516: {the thicknesses being non-uniform}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A silicon carbide MOS semiconductor device is disclosed which suppresses degradation of efficiency percentage yield with respect to a breakdown voltage even when a surface region with a high impurity concentration is formed by ion implantation with such a high dose as required for attaining a good ohmic contact. The device has a silicon carbide semiconductor substrate, a voltage blocking layer of a first conductivity type formed on the substrate, a body region of a second conductivity type formed on the voltage blocking layer, a body contact region of the second conductivity type formed in a surface region of the body region by selective ion implantation, a surface of the body contact region having such a high impurity concentration as to impart an ohmic contact, a source contact region of the first conductivity type formed in a surface region of the body region by selective ion implantation, a surface of the source contact region having such a high impurity concentration as to impart an ohmic contact, and a source extension region with an impurity concentration lower than that in the source contact region under the source contact region at a region deeper than a tail part of a bottom region of the source contact region by selective ion implantation, the source extension region having an impurity concentration less than 3×1019 cm−3.

## Claims

### Claim 1

A silicon carbide MOS semiconductor device comprising:
a silicon carbide semiconductor substrate;
a voltage blocking layer of a first conductivity type on a principal plane of the substrate;
a body region of a second conductivity type on the voltage blocking layer:
a body contact region in a surface region of the body region, the body contact region having impurity ions implanted therein and being of the second conductivity;
a source contact region in a surface region of the body region, the source contact region having impurity ions implanted therein and being of the first conductivity type, the source contact region having an impurity concentration of 3×1019 cm−or higher and a thickness of from 0.3 μm to 0.4 μm, and having a tail part in a bottom region of the source contact region with a depth deeper than the depth of ion implantation in the source contact region;
an electrode contacting the body contact region and the source contact region, wherein the surface impurity concentration of the body contact region and that of the source contact region are sufficient to cause an ohmic contact with the electrode;
a source extension region under the source contact region at a region deeper than the tail part of the doping in the bottom region of the source contact region, the source extension region having impurity ions implanted therein with an impurity concentration of less than 3×1019 cm−, which concentration is lower than that in the source contact region and a depth of the source extension region being within 1 μm from the surface of the source contact region, and being formed under the tail part by selective ion implantation; and
a trench formed from a top surface of the source contact region and passing through the source contact region, the source extension region, and the body region, and a gate electrode embedded in the trench on an internal surface thereof via an insulation film, an upper end of the embedded gate electrode being above the lower end of the source contact region,
wherein the source contact region and the voltage blocking layer are separated from each other by the body region.

### Claim 2 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein an impurity concentration and a thickness of the body contact region are either
such that a depletion layer extending from an interface between the voltage-blocking layer and the body region, reaches an avalanche breakdown voltage when a reverse bias voltage is applied to a pn junction between the voltage blocking layer and the body region before the depletion layer comes in contact with a defect region generated by implantation damage in the tail part at the bottom region of the body contact region, or
such that the depletion layer undergoes punch-through by touching the source extension region before the depletion layer comes in contact with a defect region generated by implantation damage in the tail part at the bottom region of the body contact region.

### Claim 3 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein the impurity concentration of the source extension region is not greater than 5×1018 cm−.

### Claim 4 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein the type of ions implanted in the source extension region has a mass ratio to silicon smaller than that of the type of ions implanted in the source contact region.

### Claim 5 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein the mass number of the type of ions implanted in the source extension region is 18 or less.

### Claim 6 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein the first conductivity type is an n-type, and the type of ions implanted in the source contact region is mainly phosphorus and the type of ions implanted in the source extension region is mainly nitrogen.

### Claim 7 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein the first conductivity type is a p-type, and the type of ions implanted in the source contact region is mainly aluminum and the type of ions implanted in the source extension region is mainly boron.

### Claim 8 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein the crystal form of the silicon carbide semiconductor is the hexagonal crystal form.

### Claim 9 (depends on 1)

The silicon carbide MOS semiconductor device according to claim 1, wherein a major principal plane of the silicon carbide semiconductor substrate is a {0001} plane.