# US 9,040,891 B2 · Image device and methods of forming the same

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- Number: US 9,040,891 B2
- Document ID: US9040891B2
- Status: Granted
- Kind: B2
- Application number: 13/492,348
- Filed: 2012-06-08
- Published: 2013-12-12
- Granted: 2015-05-26
- Earliest claimed: 2012-06-08
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: U-Ting Chen; Dun-Nian Yaung; Jen-Cheng Liu; Yu-Hao Shih; Chih-Chien Wang; Shih Pei Chou; Wei-Tung Huang; Cheng-Ta Wu
- Inventors: U-Ting Chen; Dun-Nian Yaung; Jen-Cheng Liu; Yu-Hao Shih; Chih-Chien Wang; Shih Pei Chou; Wei-Tung Huang; Cheng-Ta Wu
- Web page: https://patentgrep.com/patent/US9040891B2

## CPC

- H10P 76/408: {characterised by their sizes, orientations, dispositions, behaviours or shapes}
- H10F 39/014: {of CMOS image sensors}
- H10F 39/199: {Back-illuminated image sensors}
- H10F 39/802: {Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes}
- H10P 76/4085: {characterised by the processes involved to create the masks}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

A method of forming of an image sensor device includes a substrate having a pixel region and a periphery region. A plurality of first trenches is etched in the periphery region. Each of the first trenches has a depth D1. A mask layer is formed over the substrate. The mask layer has a plurality of openings in the pixel region. A spacer is formed in an interior surface of each opening. A plurality of second trenches is etched through each opening having the spacer in the pixel region. Each of the second trenches has a depth D2. The depth D1 is larger than the depth D2.

## Claims

### Claim 1

A method of forming an image sensor device, the method comprising:
etching a plurality of first trenches in a periphery region of a substrate, each of the first trenches having a depth D1;
forming a mask layer over the substrate, the mask layer having a plurality of openings in a pixel region of the substrate;
forming a spacer on an interior surface of each opening; and
etching a plurality of second trenches through each opening having the spacer in the pixel region, each of the second trenches having a depth D2, wherein the depth D1 is larger than the depth D2.

### Claim 2 (depends on 1)

The method of claim 1, wherein the depth D1 is in a range from about 2000 Å to about 3500 Å.

### Claim 3 (depends on 1)

The method of claim 1, wherein the depth D2 is in a range from about 1000 Å to about 1500 Å.

### Claim 4 (depends on 1)

The method of claim 1, wherein forming the spacer comprises:
forming a spacer layer on the interior surface of each opening in the pixel region; and
anisotropically etching the spacer layer to form the spacer on the interior surface of each opening.

### Claim 5 (depends on 1)

The method of claim 1, wherein forming the mask layer comprises:
forming a first photo resist layer overfilling the plurality of first trenches and exposing the pixel region;
forming a second photo resist layer on the first photo resist layer and the exposed pixel region; and
patterning the second photo resist layer to form the plurality of openings.

### Claim 6 (depends on 1)

The method of claim 1, further comprising:
filling a dielectric material in the plurality of first trenches and the plurality of second trenches; and
planarizing the dielectric material to form a plurality of first isolation features and a plurality of second isolation features, respectively.

### Claim 7 (depends on 6)

The method of claim 6, further comprising:
forming at least one light-sensing region in the pixel region surrounded by the plurality of second isolation features; and
forming a pinned layer overlapping the at least one light-sensing region.

### Claim 8

A method of forming an image sensor device, the method comprising:
etching a plurality of first trenches in a periphery region of a substrate, the substrate having a front surface and a back surface, each of the first trenches having a depth D1 into the substrate;
forming a mask layer over the front surface of the substrate, the mask layer having a plurality of openings in a pixel region of the substrate;
narrowing each opening in the mask layer by forming a spacer on an interior surface of each opening in the mask layer;
etching a plurality of second trenches through each narrowed opening in the pixel region, each of the second trenches having a depth D2 into the substrate, wherein the depth D1 is larger than the depth D2;
forming at least one photodetector in the substrate of the pixel region, wherein the at least one photodetector is surrounded by the plurality of second trenches; and
forming a color filter and a lens over the back surface of the substrate, wherein the color filter and the lens are aligned with the at least one photodetector.

### Claim 9 (depends on 8)

The method of claim 8, wherein the depth D1 is in a range from about 2000 Å to about 3500 Å.

### Claim 10 (depends on 8)

The method of claim 8, wherein the depth D2 is in a range from about 1000 Å to about 1500 Å.

### Claim 11 (depends on 8)

The method of claim 8, wherein narrowing each opening comprises:
forming a spacer layer on the interior surface of each opening in the pixel region; and
anisotropically etching the spacer layer, to form the spacer on the interior surface of each opening.

### Claim 12 (depends on 8)

The method of claim 8, further comprising:
filling a dielectric material in the plurality of first trenches and the plurality of second trenches; and
planarizing the dielectric material to form a plurality of first isolation features and a plurality of second isolation features, respectively.

### Claim 13 (depends on 12)

The method of claim 12, further comprising:
forming a gate stack of a transfer transistor on the front surface over a portion of the at least one photodetector.

### Claim 14 (depends on 8)

The method of claim 8, further comprising:
forming a multilayer interconnect over the front surface of the substrate,
wherein the multilayer interconnect includes vertical conductive interconnects and horizontal conductive interconnects.

### Claim 15

An image sensor device, comprising:
a substrate having a pixel region and a periphery region;
a first mask layer over the substrate, the first mask layer having a plurality of first openings in the pixel region, wherein each first opening has a first width;
a second mask layer over the first mask layer, the second mask layer having a plurality of second openings, wherein each second opening has a second width, and the second width is greater than the first width;
a spacer layer over the first mask layer, the spacer layer having a first portion on a first interior sidewall surface of each second opening and a second portion on a second interior sidewall surface of each second opening, wherein a space between the first portion of the spacer layer and the second portion of the spacer layer is about equal to the first width;
a plurality of isolation features in the periphery region, wherein each isolation feature has a depth D1;
a plurality of trenches in the pixel region, wherein each trench has a depth D2, and the depth D1 is larger than the depth D2; and
at least one light-sensing region in the pixel region, the light-sensing region being surrounded by the trenches.

### Claim 16 (depends on 15)

The image sensor device of claim 15, wherein the depth D1 is in a range from about 2000 Å to about 3500 Å.

### Claim 17 (depends on 15)

The image sensor device of claim 15, wherein the depth D2 is in a range from about 1000 Å to about 1500 Å.

### Claim 18 (depends on 15)

The image sensor device of claim 15, further comprising:
a doped layer in a back surface opposite from a front surface of the substrate.

### Claim 19 (depends on 15)

The image sensor device of claim 15, wherein each isolation feature of the plurality of isolation features comprises a second trench in the periphery region, each of the second trenches is filled with the second mask layer, the second mask layer overfills the second trenches in the periphery region, and the plurality of first openings together with the plurality of second openings expose the pixel region of the substrate.

### Claim 20 (depends on 1)

The method of claim 1, wherein the spacer is formed on a sidewall surface and a bottom surface of each opening.