# US 9,040,330 B2 · Method of manufacturing organic light-emitting display apparatus

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- Number: US 9,040,330 B2
- Document ID: US9040330B2
- Status: Granted
- Kind: B2
- Application number: 14/015,946
- Filed: 2013-08-30
- Published: 2014-10-23
- Granted: 2015-05-26
- Earliest claimed: 2013-04-18
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Myong-Hwan Choi; Woon-Hyun Choi; Kyoung-Won Oh
- Web page: https://patentgrep.com/patent/US9040330B2

## CPC

- C23C 14/042: {using masks}
- H10K 59/126: Shielding, e.g. light-blocking means over the TFTs
- H10K 71/166: {using selective deposition, e.g. using a mask}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A deposition apparatus includes (i) a sheet including a slit area, first and second dummy slit areas, and a binding area; and (ii) a frame. The slit area has a plurality of patterning slits that are extended along a first direction and arranged along a second direction crossing the first direction. The first and second dummy slit areas are outside the slit area along the second direction and along the opposite direction to the second direction respectively and have a plurality of dummy slits. The binding area surrounds the slit area and the first and second dummy slit areas. The frame is attached to the binding area of the sheet and shields at least some of the plurality of dummy slits of the first and second dummy slit areas.

## Claims

### Claim 1

A method of manufacturing an organic light-emitting apparatus, the method comprises:
transporting a moving unit to which a substrate is fixed to a chamber by using a first transport unit;
forming a layer by depositing a deposition material discharged from a deposition assembly while relatively transporting the substrate with respect to the deposition assembly by using the first transport unit while the deposition assembly and the substrate disposed in the chamber are spaced apart at a set interval; and
returning the moving unit from which the substrate is separated back by using a second transport unit that is configured to penetrate the chamber,
wherein the deposition assembly comprises a deposition source configured to evaporate the deposition material, a nozzle unit disposed to face toward the first transport unit and having a deposition source nozzle, and a patterning slit sheet facing the deposition nozzle unit and having a sheet and a frame attached to the sheet,
wherein the sheet comprises a slit area, a first dummy slit area, a second dummy slit area, and a binding area, wherein the slit area has a plurality of patterning slits that are extended along a first direction and arranged along a second direction crossing the first direction, wherein the first dummy slit area is outside the slit area in the second direction and has a plurality of dummy slits that are extended along the first direction and arranged along the second direction, wherein the second dummy slit area is outside the slit area in an opposite direction of the second direction and has a plurality of dummy slits that are extended along the first direction and arranged along the second direction, wherein the binding area surrounds the slit area, the first dummy slit area, and the second dummy slit area;
wherein the forming of the layer comprises forming of a layer while the frame is attached to the binding area of the sheet and configured to shield at least some of the plurality of the dummy slits of the first dummy slit area and the second dummy slit area of the sheet.

### Claim 2 (depends on 1)

The method of claim 1, wherein the forming of the layer comprises forming of a layer while the frame is configured to completely shield a set of the plurality of dummy slits most adjacent to the binding area among the plurality of dummy slits of the first dummy slit area and the second dummy slit area of the sheet.

### Claim 3

A method of manufacturing an organic light-emitting apparatus, the method comprises:
transporting a moving unit to which a substrate is fixed to a chamber by using a first transport unit;
forming a layer by depositing a deposition material discharged from a deposition assembly while relatively transporting the substrate with respect to the deposition assembly by using the first transport unit while the deposition assembly and the substrate disposed in the chamber are distanced apart at a set interval; and
returning the moving unit from which the substrate is separated back by using a second transport unit configured to penetrate the chamber;
wherein the deposition assembly comprises a deposition source configured to evaporate the deposition material, a nozzle unit disposed to face toward the first transport unit and having a deposition source nozzle, and a patterning slit sheet facing the deposition nozzle unit and having a sheet, a frame attached to the sheet, and a prop unit attached to the frame,
wherein the sheet comprises a slit area, a first dummy slit area, a second dummy slit area, and a binding area, wherein the slit area has a plurality of patterning slits that are extended along a first direction and arranged along a second direction crossing the first direction, wherein the first dummy slit area is outside the slit area in the second direction and has a plurality of dummy slits that are extended along the first direction and arranged along the second direction, wherein the second dummy slit area is outside the slit area in an opposite direction of the second direction and has a plurality of dummy slits that are extended along the first direction and arranged along the second direction, wherein the binding area surrounds the slit area, the first dummy slit area, and the second dummy slit area;
wherein the forming of the layer comprises forming of a layer while the frame is attached to the binding area of the sheet, and the prop unit is configured to shield at least some of the plurality of the first dummy slit area and the second dummy slit area of the sheet.

### Claim 4 (depends on 3)

The method of claim 3, wherein the prop unit comprises a first prop and a second prop, wherein the forming of the layer comprises forming a layer while the first prop shields at least one dummy slit among the plurality of dummy slits of the first dummy slit area of the sheet, and the second prop shields at least one dummy slit among the plurality of dummy slits of the second dummy slit area of the sheet.

### Claim 5 (depends on 4)

The method of claim 4, wherein the first prop and the second prop are extended along the first direction.

### Claim 6 (depends on 5)

The method of claim 5, wherein a length of the first prop and the second prop in the first direction is equal to a length of the slit area of the sheet in the first direction.

### Claim 7 (depends on 4)

The method of claim 4, wherein the first prop is in contact with the first dummy slit area of the sheet, and the second prop is in contact with the second dummy slit area of the sheet.

### Claim 8 (depends on 4)

The method of claim 4, wherein the first prop is configured to completely shield a dummy slit most adjacent to the binding area among the plurality of dummy slits of the first dummy slit area, and the second prop is configured to completely shield a dummy slit most adjacent to the binding area among the plurality of dummy slits of the second dummy slit area.