# US 9,040,313 B2 · Method of manufacturing organic light emitting display device using organic layer deposition apparatus

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- Number: US 9,040,313 B2
- Document ID: US9040313B2
- Status: Granted
- Kind: B2
- Application number: 14/196,469
- Filed: 2014-03-04
- Published: 2014-12-18
- Granted: 2015-05-26
- Earliest claimed: 2013-06-17
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Jong-Won Hong
- Web page: https://patentgrep.com/patent/US9040313B2

## CPC

- H10P 72/0456: {in-line arrangement}
- H10K 71/166: {using selective deposition, e.g. using a mask}
- H10K 71/191: {characterised by provisions for the orientation or alignment of the layer to be deposited}
- H10P 72/3306: {Horizontal transfer of a single workpiece}
- H10P 72/3314: {Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers}
- H10P 72/50: for positioning, orientation or alignment
- H10P 72/57: {Mask-wafer alignment}
- H10P 74/203: {Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A method of manufacturing an organic light-emitting display device is provided. An alignment master member is loaded on a moving unit. An organic layer deposition assembly is pre-aligned to the alignment master member. After the pre-aligning of the organic layer deposition assembly, a substrate is loaded on the moving unit. The organic layer deposition assembly is aligned to the substrate positioned as is after the loading of the substrate. An organic layer is formed on the substrate while the moving unit is moving along the moving direction. While the moving unit is moving along the moving direction, the organic layer deposition assembly is adjusted so that an interval between the organic layer deposition assembly and part of the substrate is maintained as substantially constant. The part of the substrate receives a deposition material emitted from the organic layer deposition assembly to form the organic layer.

## Claims

### Claim 1

A method of manufacturing an organic light-emitting display device, the method comprising:
loading an alignment master member on a moving unit;
pre-aligning an organic layer deposition assembly to the alignment master member positioned as is after the loading of the alignment master member, wherein the moving unit moves in a moving direction over the organic layer deposition assembly and the alignment master member is unloaded after the pre-aligning of the organic layer deposition assembly to the alignment master member;
loading, after the pre-aligning of the organic layer deposition assembly, a substrate on the moving unit;
before the moving unit on which the substrate is held moves over the deposition assembly along the moving direction, aligning the organic layer deposition assembly to the substrate positioned as is after the loading of the substrate; and
forming an organic layer on the substrate while the moving unit is moving along the moving direction,
wherein while the moving unit is moving along the moving direction, the organic layer deposition assembly is adjusted so that an interval between the organic layer deposition assembly and part of the substrate is maintained as substantially constant, wherein the part of the substrate receives a deposition material emitted from the organic layer deposition assembly to form the organic layer.

### Claim 2 (depends on 1)

The method of claim 1, wherein the pre-aligning of the organic layer deposition assembly to the alignment master member is performed using a first position information of the alignment master member, and wherein the aligning of the organic layer deposition assembly to the substrate is performed using a second position information of the substrate.

### Claim 3 (depends on 2)

The method of claim 2, wherein the first position information comprises, at least an angular displacement of the alignment master member with respect to the moving direction and a distance between a reference measuring unit and the alignment master member, wherein the second position information comprises at least an angular displacement of the substrate with respect to the moving direction and a distance between the reference measuring unit and the substrate, wherein the reference measuring unit is configured to measure the first and second position information.

### Claim 4 (depends on 3)

The method of claim 3, wherein the pre-aligning of the organic layer deposition assembly to the alignment master member comprises:
obtaining the first position information of the alignment master member using the reference measuring unit; and
adjusting a position of a patterning slit sheet of the organic layer deposition assembly according to the first position information of the alignment master member, wherein the pattering slit sheet is configured to direct the deposition material toward the substrate moving along the moving direction.

### Claim 5 (depends on 4)

The method of claim 4, wherein the reference measuring unit comprises at least three gap sensors configured to define a plane of the reference measuring unit or the substrate.

### Claim 6 (depends on 3)

The method of claim 3, wherein the aligning of the patterning slit sheet comprises obtaining third position information of the patterning slit sheet relative to the alignment master member,
wherein the aligning of the patterning slit sheet is performed using the third position information.

### Claim 7 (depends on 6)

The method of claim 6, wherein the alignment master measuring unit comprises at least three gap sensors configured to define a plane of the patterning slit sheet.

### Claim 8 (depends on 4)

The method of claim 4, wherein the aligning of the organic layer deposition assembly to the substrate comprises:
obtaining the second position information of the substrate using the reference measuring unit; and
adjusting the position of the patterning slit sheet of the organic layer deposition assembly by calculating a difference between the first position information and the second position information.

### Claim 9 (depends on 8)

The method of claim 8, wherein the calculating of the difference between the first position information and the second position information comprises calculating a twisting variation between the angular displacement of the alignment master member and the angular displacement of the substrate.

### Claim 10 (depends on 9)

The method of claim 9, wherein the patterning slit sheet is rotated according to the twisting variation.

### Claim 11 (depends on 8)

The method of claim 8, wherein the first position information of the alignment master member further comprises a center position of the alignment master member, wherein the second position information of the substrate further comprises a center position of the substrate, wherein the calculating of the difference between the first position information and the second position information comprises calculating a shifting distance between the center position of the first position information and the center position of the second position information, wherein the shifting distance is calculated along a shifting direction substantially perpendicular to the moving direction.

### Claim 12 (depends on 11)

The method of claim 11, wherein the patterning slit sheet is shifted to the substrate along the shifting direction according to the shifting distance.

### Claim 13 (depends on 8)

The method of claim 8, wherein the organic layer deposition assembly further comprises:
a first stage and a second stage configured to three-dimensionally move the patterning slit sheet; and
a stage measuring unit configured to obtain fourth position information of the substrate relative to the first stage or the second stage.

### Claim 14 (depends on 13)

The method of claim 13, wherein the stage measuring unit comprises at least four gap sensors configured to define a plane of the substrate moving along the moving direction.

### Claim 15 (depends on 14)

The method of claim 14, wherein, if the substrate is being sensed by only two gap sensors, a height of the patterning slit sheet is controlled so that the interval between the part of the substrate and the patterning slit sheet is maintained as substantially constant.

### Claim 16 (depends on 14)

The method of claim 14, wherein, if the substrate is being sensed by the four gap sensors, the height of the patterning slit sheet and tilting of the patterning slit sheet are controlled in real time so that the interval between the part of the substrate and the patterning slit sheet is maintained as substantially constant.

### Claim 17 (depends on 1)

The method of claim 1, wherein the patterning slit sheet of the organic layer deposition assembly is smaller than the substrate in at least the moving direction.