Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern

A monomeric compound represented by general formula (b1-1) shown below:

• Rx-Q3-O-Q2-Y1-SO3−Z+ (b1−1)
• wherein Rx represents a group in which one or more hydrogen atoms have been removed from a monocycloalkane with or without a group containing at least one atom selected from the group consisting of a halogen atom, an oxygen atom and a sulfur atom as a substituent, or a group in which one or more hydrogen atoms have been removed from a polycycloalkane with or without a group containing at least one atom selected from the group consisting of a halogen atom, an oxygen atom and a sulfur atom as a substituent, Q2 represents a hetero atom-containing linkage group;
• Q3 represents an ether bond (—O—), a thioether bond (—S—), an —NH— bond (the H may be replaced with a substituent such as an alkyl group or an acyl group), an ester bond (—C(═O)—O—), an amido bond (—C(═O)—NH—), a carbonyl group (—C(═O)—) and a carbonate bond (—O—C(═O)—O—), —R91—O—, —R92—O—C(═O)— or —C(═O)—O—R93-( wherein each of R91 to R93 independently represents an e linear or branched alkylene group);
• Y1 represents an alkylene group or fluorinated alkyl group of 1 to 4 carbon atoms;
• and Z+ represents an organic cation exclusive of an ion represented by general formula (w-1) shown below:
• wherein each of R3 to R6 independently represents a hydrogen atom or a hydrocarbon group with or without a substituent, with the proviso that at least one of R3 to R6 represents a hydrocarbon group;
• and at least two of R3 to R6 may be mutually bonded to form a ring.

A monomeric compound represented by general formula (b0-1) shown below:

• wherein Rx represents a saturated hydrocarbon group with or without a substituent exclusive of a nitrogen atom;
• each of Q2 and Q3 independently represents a hetero atom-containing linkage group;
• Y1 represents an alkylene group or fluorinated alkyl group of 1 to 4 carbon atoms;
• each of R3 to R6 independently represents a hydrogen atom or a hydrocarbon group with or without a substituent, with the proviso that at least one of R3 to R6 represents a hydrocarbon group;
• and at least two of R3 to R6 may be mutually bonded to form a ring.