# US 9,040,211 B2 · Mask and method of manufacturing a substrate using the mask

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- Number: US 9,040,211 B2
- Document ID: US9040211B2
- Status: Granted
- Kind: B2
- Application number: 13/773,400
- Filed: 2013-02-21
- Published: 2014-02-13
- Granted: 2015-05-26
- Earliest claimed: 2012-08-13
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Chang-Soon Jang; Soo-Hye Ryu; Yi-Seop Shim; Gwan-Soo Kim; Chul Huh
- Web page: https://patentgrep.com/patent/US9040211B2

## CPC

- G03F 7/0035: {Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface}
- G03F 7/00: Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K)
- G03F 7/0007: {Filters, e.g. additive colour filters; Components for display devices}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A mask includes a substantially transparent portion. The mask further includes a halftone portion abutting the substantially transparent portion, a light transmittance of the halftone portion being greater than 0% and less than 100%. The mask further includes a blocking portion abutting the halftone portion, a light transmittance of the blocking portion being less than the light transmittance of the halftone portion.

## Claims

### Claim 1

A mask comprising:
a substantially transparent portion;
a first halftone portion abutting the substantially transparent portion, a light transmittance of the first halftone portion being greater than 0% and less than 100%; and
a first blocking portion abutting the first halftone portion, a light transmittance of the first blocking portion being substantially 0%, wherein the substantially transparent portion surrounds the first blocking portion.

### Claim 2 (depends on 1)

The mask of claim 1, further comprising:
a second halftone portion abutting the substantially transparent portion, a light transmittance of the second halftone portion being greater than 0% and less than 100%; and
a second blocking portion abutting the second halftone portion, a light transmittance of the second blocking portion being less than the light transmittance of the second halftone portion,
wherein the substantially transparent portion is disposed between the first halftone portion and the second halftone portion, and
wherein the first halftone portion is disposed between the first blocking portion and the substantially transparent portion.

### Claim 3 (depends on 1)

The mask of claim 1, wherein the light transmittance of the first halftone portion is in a range of about 10% to about 20%.

### Claim 4 (depends on 1)

The mask of claim 1, wherein a width of the first halftone portion is in a range of half of a width of the substantially transparent portion to the width of the substantially transparent portion.

### Claim 5 (depends on 1)

The mask of claim 1, further comprising:
a second halftone portion abutting the substantially transparent portion, a light transmittance of the second halftone portion being greater than 0% and less than 100%,
wherein the first blocking portion is disposed between the first halftone portion and the second halftone portion, and
the substantially transparent portion surrounds the first blocking portion, the first halftone portion, and the second halftone portion.

### Claim 6 (depends on 1)

The mask of claim 1, wherein the first blocking portion has a rectangular shape, wherein the first halftone portion has a rectangular shape and surrounds the first blocking portion, and wherein the substantially transparent portion surrounds the first halftone portion.

### Claim 7

A mask comprising:
a substantially transparent portion;
a first halftone portion abutting the substantially transparent portion, a light transmittance of the first halftone portion being greater than 0% and less than 100%; and
a first blocking portion abutting the first halftone portion, a light transmittance of the first blocking portion being substantially 0%,
wherein the first halftone portion surrounds the substantially transparent portion.

### Claim 8 (depends on 7)

The mask of claim 7, wherein the substantially transparent portion has a circular shape, and wherein the first halftone portion has a rectangular shape or a circular shape.

### Claim 9 (depends on 8)

The mask of claim 8, further comprising a second substantially transparent portion, wherein the first halftone portion further surrounds the second substantially transparent portion, and wherein a portion of the first halftone portion is disposed between the substantially transparent portion and the second substantially transparent portion.