Using chemical vapor deposited films to control domain orientation in block copolymer thin films

A method of applying a top coat to a block copolymer film to create a layered structure, comprising:

• a) providing a surface, a surface energy neutralizing layer, a block copolymer, and a composition comprising parylene;
• b) treating said surface with said surface energy neutralizing layer such that a first layer on said surface is created, said layer comprising a crosslinked polymer;
• c) coating said first layer with block copolymer such that a second layer on said surface is created comprising a film;
• and
• d) depositing said composition by vacuum deposition on said second layer so as to create a third layer on said surface, said third layer comprising a top coat on said block copolymer film surface, said first, second and third layers comprising a layered structure.