# US 9,039,478 B2 · Apparatus for manufacturing deposition mask assembly for flat panel display

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- Number: US 9,039,478 B2
- Document ID: US9039478B2
- Status: Granted
- Kind: B2
- Application number: 14/062,358
- Filed: 2013-10-24
- Published: 2014-05-01
- Granted: 2015-05-26
- Earliest claimed: 2012-10-25
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Eui-Gyu Kim; Suk-Ho Kang
- Web page: https://patentgrep.com/patent/US9039478B2

## CPC

- G03F 1/22: Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- C23C 14/042: {using masks}
- G03F 7/0015: {Production of aperture devices, microporous systems or stamps}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

Provided is an apparatus for manufacturing a deposition mask assembly for a flat panel display, which prevents a pattern from being distorted in a pattern mask when divided pattern masks are welded to a support fixture. An apparatus for manufacturing a deposition mask assembly for a flat panel display of the present description, which includes a frame mask forming an opening, a support fixture installed in the frame mask, and a pattern mask welded to the support fixture to have a pattern allowing a deposition material to be transmitted therethrough, includes: a welding head disposed in a side of the pattern mask; and a support member supporting the support fixture in an opposite side of the welding head with the pattern mask interposed therebetween.

## Claims

### Claim 1

An apparatus for manufacturing a deposition mask assembly for a flat panel display, the deposition mask assembly comprising a frame mask forming an opening, a support fixture installed in the frame mask, and a pattern mask welded to the support fixture to have a pattern allowing a deposition material to be transmitted therethrough, the apparatus comprising:
a welding head disposed in a side of the pattern mask; and
a support member supporting the support fixture in an opposite side of the welding head with the pattern mask interposed therebetween.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the support fixture is disposed in parallel in the plural to cross the opening and be fixed to the frame mask, and the support member is installed to correspond to each of a plurality of support fixtures.

### Claim 3 (depends on 1)

The apparatus of claim 1, wherein the support member comprises a rod ascending and descending toward the support fixture, and any one of a cylinder and a motor operating the rod.

### Claim 4 (depends on 3)

The apparatus of claim 3, wherein the rod has a support pin having a convex curved surface at an upper end that is in contact with the support fixture.

### Claim 5 (depends on 3)

The apparatus of claim 3, further comprising a vision unit installed in an opposite side of the support member to sense supporting of the support member by a laser auto-focus.