# US 9,039,477 B2 · Method of manufacturing an organic light emitting display

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- Number: US 9,039,477 B2
- Document ID: US9039477B2
- Status: Granted
- Kind: B2
- Application number: 13/859,601
- Filed: 2013-04-09
- Published: 2014-07-10
- Granted: 2015-05-26
- Earliest claimed: 2010-02-08
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd
- Inventors: Eun-Ah Kim
- Web page: https://patentgrep.com/patent/US9039477B2

## CPC

- H10K 59/127: comprising two substrates, e.g. display comprising OLED array and TFT driving circuitry on different substrates
- H10K 59/1275: {Electrical connections of the two substrates}
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

An organic light emitting display resulting in an improved aperture ratio and a manufacturing method thereof. The organic light emitting display that includes a plurality of pixels arranged between first and second substrates, each of said pixels includes a plurality of thin film transistors, an organic light emitting diode, and a capacitor. The thin film transistors and the organic light emitting diode are formed on the first substrate and the capacitor is formed on the second substrate, and the thin film transistors and the capacitor are electrically connected with each other upon the first substrate being bonded to the second substrate.

## Claims

### Claim 1

A method of manufacturing an organic light emitting display, comprising:
forming a plurality of thin film transistors and an organic light emitting diode on a first substrate;
forming a capacitor on a second substrate; and
electrically connecting the plurality of thin film transistors and the capacitor to each other by bonding the first substrate to the second substrate.

### Claim 2 (depends on 1)

The method of claim 1, wherein the forming of the organic light emitting diode on the first substrate includes forming a first lower electrode of the capacitor on the first substrate that is electrically connected to the thin film transistors.

### Claim 3 (depends on 2)

The method of claim 2, wherein the first lower electrode of the capacitor is electrically connected to the capacitor.

### Claim 4 (depends on 1)

The method of claim 1, wherein the forming of the capacitor on the second substrate includes:
forming a spacer on the second substrate;
forming upper electrode of the capacitor on the spacer; and
forming a dielectric layer on the upper electrode of the capacitor.

### Claim 5 (depends on 4)

The method of claim 4, wherein the first lower electrode of the capacitor contacts the dielectric layer upon the bonding of the first substrate to the second substrate.

### Claim 6 (depends on 4)

The method of claim 4, further comprising forming a second lower electrode of the capacitor on the dielectric layer.

### Claim 7 (depends on 6)

The method of claim 6, wherein the first lower electrode of the capacitor contacts the second lower electrode of the capacitor upon the bonding of the first substrate to the second substrate.

### Claim 8 (depends on 2)

The method of claim 2, before the forming of the first lower electrode of the capacitor, the method further comprises:
forming first and second semiconductor layers on the first substrate;
forming a gate insulating layer on the first substrate that includes the first and second semiconductor layers;
forming first and second gate electrodes on the gate insulating layer to partially overlap the first and second semiconductor layers;
forming an interlayer insulating layer on the first substrate that includes the first and second gate electrodes;
forming first to fifth contact holes by partially etching the gate insulating layer and the interlayer insulating layer;
forming first source and drain electrodes and second source and drain electrodes on the interlayer insulating layer, the second drain electrode being electrically connected to the first gate electrode that is exposed by one of the contact holes;
forming a passivation layer on the first substrate that includes the first source and drain electrodes and the second source and drain electrodes; and
etching the passivation layer to form first and second via holes, the first lower electrode of the capacitor being arranged on the passivation layer.

### Claim 9 (depends on 8)

The method of claim 8, wherein the second drain electrode extends to be electrically connected to the first gate electrode.

### Claim 10 (depends on 8)

The method of claim 8, further comprising:
forming a pixel electrode on the passivation layer;
forming a pixel defining layer on the passivation layer, the pixel defining layer being perforated by first and second openings that expose the pixel electrode and the first lower electrode of the capacitor respectively;
forming an organic layer on the exposed pixel electrode; and
forming a counter electrode on the organic layer.

### Claim 11 (depends on 10)

The method of claim 10, wherein the pixel electrode and the first lower electrode of the capacitor are produced in the same process.

### Claim 12 (depends on 10)

The method of claim 10, wherein the pixel electrode and the first lower electrode of the capacitor are comprised of the same material.

### Claim 13 (depends on 1)

The method of claim 1, the display being a front emission display where an image is viewed from a side corresponding to the second substrate and not from a side corresponding to the first substrate.

### Claim 14 (depends on 2)

The method of claim 2, wherein the first lower electrode of the capacitor is formed at a same time and of a same material as that of a pixel electrode of the organic light emitting diode.

### Claim 15 (depends on 1)

The method of claim 1, wherein the capacitor is arranged at a location corresponding to the thin film transistors and not the organic light emitting diode.

### Claim 16 (depends on 1)

The method of claim 1, wherein the bonding occurs after the forming of the thin film transistors and the organic light emitting diode on the first substrate, and after the forming of the capacitor on the second substrate.

### Claim 17 (depends on 2)

The method of claim 2, further comprising:
forming a passivation layer on the thin film transistors on the first substrate;
forming a pixel electrode of the diode and a first lower electrode of the capacitor on the passivation layer, the pixel electrode and the first lower electrode being formed simultaneously and being comprised of a same material; and
forming a pixel defining layer on the passivation layer, the pixel defining layer being perforated by first and second openings that expose the pixel electrode and the first lower electrode of the capacitor respectively.

### Claim 18

A method of manufacturing an organic light emitting display, comprising:
forming a plurality of thin film transistors and an organic light emitting diode on a first substrate;
forming portions of a capacitor on a second and different substrate; and then
electrically connecting the plurality of thin film transistors to the portions of the capacitor by bonding the second substrate to the first substrate.

### Claim 19 (depends on 18)

The method of claim 18, wherein the method further includes forming a first layer of lower electrode of the capacitor on the first substrate, wherein the forming of the portions of the capacitor on the second and different substrate comprises:
forming an upper electrode of the capacitor on the second substrate;
forming a dielectric layer of the capacitor on the upper electrode; and
forming a second layer of the lower electrode of the capacitor on the dielectric layer, wherein the second layer of the lower electrode of the capacitor is directly bonded to the first layer of the lower electrode of the capacitor upon the bonding together of the first and second substrates.

### Claim 20 (depends on 18)

The method of claim 18, wherein the forming of the organic light emitting diode on the first substrate comprises:
depositing a passivation layer on the thin film transistors formed on the first substrate; and
forming simultaneously a pixel electrode of the organic light emitting diode and a first lower electrode of the capacitor on the passivation layer on the first substrate.