# US 9,039,143 B2 · Ink jet recording head and method for manufacturing the same

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- Number: US 9,039,143 B2
- Document ID: US9039143B2
- Status: Granted
- Kind: B2
- Application number: 14/231,502
- Filed: 2014-03-31
- Published: 2014-10-02
- Granted: 2015-05-26
- Earliest claimed: 2013-04-02
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Mitsuru Chida; Kenji Fujii; Makoto Watanabe; Toshiaki Kurosu; Masataka Nagai; Takanobu Manabe
- Web page: https://patentgrep.com/patent/US9039143B2

## CPC

- B41J 2/14145: {Structure of the manifold}
- B41J 2/1603: {of the front shooter type}
- B41J 2/1628: {dry etching}
- B41J 2/1629: {wet etching}
- B41J 2/1631: {photolithography}
- B41J 2/1643: {thin film formation by plating}
- B41J 2/1645: {thin film formation by spincoating}
- B41J 2/1646: {thin film formation by sputtering}
- B41J 2002/14387: {Front shooter}
- Y10T 29/49162: by using wire as conductive path
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

An ink jet recording head includes a substrate having a plurality of discharge energy generation elements and having an ink supply port, a protective film provided on the substrate and configured to protect wiring connected to the discharge energy generation elements, and an ink discharge port forming member, wherein the protective film has a protruding portion, wherein the ink discharge port forming member has a beam-like protrusion, wherein the beam-like protrusion has a reinforcing rib, and wherein a separation film containing gold is formed at a portion where the protruding portion and the reinforcing rib are held in close contact with each other.

## Claims

### Claim 1

An ink jet recording head comprising:
a substrate having a plurality of discharge energy generation elements arranged in two rows and having an ink supply port formed between the two rows of the plurality of discharge energy generation elements;
a protective film provided on the substrate and configured to protect wiring connected to the discharge energy generation elements; and
an ink discharge port forming member forming an ink flow path communicating with the ink supply port between the ink discharge port forming member and the substrate and having an ink discharge port communicating with the ink flow path at a position corresponding to each of the discharge energy generation elements,
wherein the protective film has a protruding portion, which protrudes from the substrate toward the ink supply port side,
wherein the ink discharge port forming member has a beam-like protrusion over the ink supply port between the ink discharge port forming member and the substrate,
wherein the beam-like protrusion has a reinforcing rib extending toward the substrate side, and
wherein a separation film containing gold is formed at a portion where the protruding portion and the reinforcing rib are held in close contact with each other.

### Claim 2 (depends on 1)

The ink jet recording head according to claim 1, wherein the separation film is formed on the protective film and at a tip of the ink supply port.

### Claim 3 (depends on 1)

The ink jet recording head according to claim 1, wherein the separation film and the reinforcing rib are separable from each other.

### Claim 4 (depends on 1)

The ink jet recording head according to claim 1, wherein the separation film further contains at least one of stainless steel, titanium, and aluminum.

### Claim 5 (depends on 1)

The ink jet recording head according to claim 1, wherein the reinforcing rib contains a photosensitive epoxy resin.

### Claim 6 (depends on 1)

The ink jet recording head according to claim 1, wherein the protective film contains at least one of silicon nitride, silicon monoxide, and silicon carbide.

### Claim 7 (depends on 1)

The ink jet recording head according to claim 1, wherein the thickness of the separation film is at least 2.0 μm or more and up to 5.0 μm or less.

### Claim 8

An ink jet recording head manufacturing method comprising:
forming a discharge energy generation element, an electrode pad, and wiring on a substrate;
forming a protective film on the substrate to protect the wiring;
forming a film containing gold on the electrode pad and on a portion constituting a protruding portion of the protective film;
forming an ink discharge port forming member on the substrate;
forming an ink supply port in the substrate; and
forming an ink flow path.

### Claim 9 (depends on 8)

The ink jet recording head manufacturing method according to claim 8, wherein a film containing gold on the electrode pad and on a portion constituting a protruding portion of the protective film is formed simultaneously, in the forming of the film.

### Claim 10 (depends on 8)

The ink jet recording head manufacturing method according to claim 8, wherein a film containing gold is formed by using gold plating method, in the forming of the film.