# US 9,038,998 B2 · Support structures and clamping systems for semiconductor devices during wire and ribbon bonding operations

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- Number: US 9,038,998 B2
- Document ID: US9038998B2
- Status: Granted
- Kind: B2
- Application number: 13/510,151
- Filed: 2010-11-16
- Published: 2012-11-01
- Granted: 2015-05-26
- Earliest claimed: 2009-11-17
- Assignees: Orthodyne Electronics Corporation
- Applicants: Jonathan Michael Byars
- Inventors: Jonathan Michael Byars
- Web page: https://patentgrep.com/patent/US9038998B2

## CPC

- H10W 72/0198: {batch processes}
- H10W 72/076: {of strap connectors}
- H10W 72/60: Strap connectors, e.g. thick copper clips for grounding of power devices
- H10W 72/0711: {Apparatus therefor}
- H10W 72/07178: {Means for aligning}
- H10W 72/07532: {Compression bonding, e.g. thermocompression bonding}
- H10W 72/07533: {Ultrasonic bonding, e.g. thermosonic bonding}
- H10W 72/07653: {changes in shapes}
- H10W 72/534: {being rectangular}
- H10W 72/5363: {the connected ends being wedge-shaped}
- H10W 72/5438: {the bond wires having multiple connections on the same bond pad}
- H10W 72/5453: {connecting between multiple bond pads on a chip, e.g. daisy chain}
- H10W 90/756: {between a chip and a stacked lead frame, conducting package substrate or heat sink}
- H10W 90/766: {between a chip and a stacked lead frame, conducting package substrate or heat sink}
- Y10S 269/903: Work holder for electrical circuit assemblages or wiring systems
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A support structure for supporting a semiconductor device during a bonding operation is provided. The support structure comprises a body portion defining an upper surface configured to support a semiconductor device during a bonding operation. The upper surface defines a constraining feature for constraining at least a portion of the semiconductor device during the bonding operation.

## Claims

### Claim 1

A support structure for supporting a semiconductor device during a bonding operation, the support structure comprising:
a body portion, the body portion defining an upper surface configured to support a semiconductor device during a bonding operation, the upper surface defining a constraining feature for constraining at least a portion of the semiconductor device during the bonding operation,
wherein the constraining feature includes a raised portion raised above the upper surface to constrain the portion of the semiconductor device during the bonding operation.

### Claim 2 (depends on 1)

The support structure of claim 1 further comprising a base portion wherein the body portion is secured to the base portion during the bonding operation.

### Claim 3 (depends on 2)

The support structure of claim 2 wherein the base portion is formed from a first material and the body portion is formed from a second material, the second material being different from the first material.

### Claim 4 (depends on 3)

The support structure of claim 3 wherein the base portion is formed from a metallic material and the body portion is formed from an insulative material.

### Claim 5 (depends on 3)

The support structure of claim 3 wherein the body portion is formed from a ceramic material.

### Claim 6 (depends on 3)

The support structure of claim 3 further comprising a compliant material between the body portion and the base portion.

### Claim 7 (depends on 2)

The support structure of claim 2 further comprising a compliant material between the body portion and the base portion.

### Claim 8 (depends on 1)

The support structure of claim 1 wherein support structure is an anvil configured for use on a wedge bonding machine.

### Claim 9 (depends on 1)

The support structure of claim 1 wherein the raised portion includes substantially parallel raised features to constrain the portion of the semiconductor device during the bonding operation.

### Claim 10 (depends on 1)

The support structure of claim 1 wherein the raised portion defines a valley to constrain the portion of the semiconductor device during the bonding operation.

### Claim 11 (depends on 1)

The support structure of claim 1 wherein the raised portion includes a plurality of wall portions to at least partially surround, and thereby constrain, the portion of the semiconductor device during the bonding operation.

### Claim 12 (depends on 1)

The support structure of claim 1 wherein the semiconductor device includes a leadframe, and wherein the portion of the semiconductor device constrained by the raised feature includes a portion of the leadframe.

### Claim 13 (depends on 12)

The support structure of claim 12 wherein the portion of the leadframe constrained by the raised feature includes at least one of a lead, a tie bar, a heat sink, and a die paddle of the leadframe.

### Claim 14 (depends on 1)

The support structure of claim 1 wherein the semiconductor device includes a leadframe, and wherein the portion of the semiconductor device constrained during the bonding operation by the constraining feature includes a portion of the leadframe.

### Claim 15 (depends on 14)

The support structure of claim 14 wherein the portion of the leadframe constrained by the constraining feature includes at least one of a lead and a tie bar of the leadframe.

### Claim 16 (depends on 1)

The support structure of claim 1 wherein the constraining feature is configured to constrain the portion of the semiconductor device in at least one direction.

### Claim 17 (depends on 16)

The support structure of claim 16 wherein the at least one direction is a horizontal direction.

### Claim 18 (depends on 16)

The support structure of claim 16 wherein the at least one direction includes a direction of ultrasonic scrubbing of a bonding tool motion of a wire bonding machine.

### Claim 19 (depends on 16)

The support structure of claim 16 wherein the at least one direction includes at least two directions.
