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AssigneeAdvanced Technology Materials, Inc.
InventorsSteven M. Lurcott, John E. Q. Hughes, Peter Wrschka, Thomas H. Baum, Donald D. Ware, Peng Zou
Estimating the term…
Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
A method including use of a collapsible liner disposed within an overpack container defining an interstitial space between the liner and container, and a cap operatively coupled with the overpack and defining at least one depressurization port and at least one feed material port in fluid communication with the interior volume of the liner, the at least one depressurization port being in fluid communication with the interstitial space and arranged for depressurization and/or pressurization of the interstitial space, the method comprising:
A feed material supply system comprising a collapsible liner disposed within an overpack container defining an interstitial space between the liner and the overpack container, a cap operatively coupled with the overpack that places the interstitial space in fluid communication with a vacuum source and an interior volume of the liner in fluid communication with a feed material source, to permit application of subatmospheric pressure to the interstitial space to cause the liner to expand and draw the feed material from the feed material source into the interior volume of the liner, wherein a sensor is arranged to sense presence of gas that has migrated through the liner during said application of subatmospheric pressure.
A system comprising:
A method including use of a collapsible liner disposed within an overpack container defining an interstitial space between the liner and container, the method comprising:
Dependencies are inferred from the claim text.