# US 9,038,423 B2 · Porous glass preform production apparatus

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- Number: US 9,038,423 B2
- Document ID: US9038423B2
- Status: Granted
- Kind: B2
- Application number: 14/056,961
- Filed: 2013-10-18
- Published: 2014-03-20
- Granted: 2015-05-26
- Earliest claimed: 2007-02-28
- Assignees: Shin-Etsu Chemical Co., Ltd.
- Applicants: Shin-Etsu Chemical Co., Ltd.
- Inventors: Makoto Yoshida
- Web page: https://patentgrep.com/patent/US9038423B2

## CPC

- C03B 37/01406: {Deposition reactors therefor}
- C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES

## Abstract

A porous preform production apparatus having a reaction vessel which includes an upper deposition chamber having an air supply inlet and an exhaust outlet, a lower deposition chamber having an air supply inlet, and a top chamber disposed on top of the upper deposition chamber and adapted to lift and store a porous preform formed by deposition, characterized in that the floor of the upper deposition chamber is disposed at a height between the lower end of a straight body part and the deposition tip of the porous glass preform during deposition, and a connection opening which connects the upper deposition chamber with the lower deposition chamber, is provided on the floor of the upper deposition chamber, and that when the aperture diameter of the connection opening is designated as A and the diameter of the porous preform passing through the connection opening as B, the ratio B/A satisfies the expression 0.05≦B/A≦0.6.

## Claims

### Claim 1

A method of producing a porous glass preform using a porous glass preform production apparatus with a reaction vessel including an upper deposition chamber having a first air supply inlet in a first wall and an exhaust outlet in a second wall opposing the first wall, a lower deposition chamber having a second air supply inlet and connected to the upper deposition chamber by a connection opening on a floor of the upper deposition chamber, and a top chamber disposed on top of the upper deposition chamber and adapted to lift and store a porous glass preform formed by deposition, the method comprising:
supplying raw materials for glass, a combustible gas, and a combustion supporting gas to burners disposed in the apparatus; and
depositing glass microparticles generated by a flame hydrolysis reaction of the glass raw materials to produce a porous glass preform such that, during deposition, the floor of the upper deposition chamber is disposed at a height between a lower end of a straight body part and a deposition tip of the porous glass preform and a regular airflow passes through the connection opening from the lower deposition chamber to the upper deposition chamber, wherein
an angle of elevation θ from an upper end of the exhaust outlet to an upper end of the first air supply inlet satisfies the expression 5 degrees≦θ≦50 degrees,
the second wall includes a substantially vertical wall segment above the exhaust outlet and facing the first air supply inlet, and
the wall segment extends from the upper end of the exhaust outlet to a ceiling of the upper deposition chamber.

### Claim 2 (depends on 1)

The method according to claim 1, wherein 0.05≦B/A≦0.6, where A is an aperture diameter of the connection opening and B is a diameter of the porous glass preform passing through the connection opening.

### Claim 3 (depends on 1)

The method apparatus according to claim 1, wherein a distance from a center of the connection opening to an inner wall of the upper deposition chamber is A or more, where A is an aperture diameter of the connection opening.

### Claim 4 (depends on 1)

The method according to claim 1, wherein a distance from a center of the connection opening to an inner wall of the lower deposition chamber is 0.7 A or more, where A is an aperture diameter of the connection opening.

### Claim 5 (depends on 1)

The method according to claim 1, wherein an inner surface of the connection opening is processed by chamfering or processed to have a curved surface.

### Claim 6 (depends on 1)

The method according to claim 1, wherein the connection opening has a structure separable from the floor of the upper deposition chamber.

### Claim 7 (depends on 1)

The method according to claim 1, wherein gas supplied through the air supply inlets is ambient air which has been passed through a filter.

### Claim 8 (depends on 1)

The method according to claim 1, further comprising controlling pressure inside the reaction vessel using an automated pressure controller installed downstream from the exhaust outlet.